二手 LAM RESEARCH TCP 9600 SE #9177741 待售
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ID: 9177741
晶圓大小: 8"
優質的: 2000
Metal etcher system, 8"
Software version: Version E1.5-released
Software envision: 1.5 With light pen
Process METAL ETCH
Platform type: Rainbow stand-alone TCP 9600SE
Wafer shape: SNNF
Main chamber: TCP 9600SE
Enterance loadlock: Standard entrance loadlock chamber
Exit loadlock: DSQ Chamber with 8″ paddle
APM Chamber: (2) APM DI Nozzles, N2 splayer
Load station: Belt type shuttle
Indexers: 38A Hine indexers
Wafer alinger: Universal
Upper chamber body: TCP 9600se
Gap: 6CM Upper chamber fixed gap
Electrostatic chuck type: 8″ Bi-polar ESC
Turbo pump: ALCATEL 1300M with Controller
Pressure manometer: Millipore 100mT
Pressure controller:
VAT Gate valve
PM7 Pressure controller
End point: Detector heated port
With dual channels (261.8nm/ 703nm)
Matchers:
Auto tuner
T Matcher for upper
(8) Turn RF coil matcher for Bias
Generators on board: AE-1250 For upper and bias chamber
Helium back side cooling 50sccm UPC (Unit 8130)
ADIO Boards
Main board
ESC Power supply:
(16) Channel heater controllers
Chamber: Auto tune DSQ strip module
Funnel: 8″ Quartz funnel
Paddle: 8″ Heated Paddle
Hardware configuration:
Pressure controller: AC2 Pressure controller
Pressure manometer: MKS 10TORR
WVDS: Auto fill WVDS controller
WVDS Temperature controller: Auto temp controller
Cooling fan hinged DSQ stripper
With high flow cooling fan
Vapor controller: TYLAN 500sccm H2O Controller
RF Tuner:
(8) Tunes
RF Coil matcher (DIP-PCB RF Tuner)
RF Generator on board: AE-1250
Heater controller: 853-015771-001
Spinner: 853-015759-102
DI Water nozzles:
Hot
Cold high water flow nozzles
Line 1: Gas CL2
Line 2: Gas BCL3
Line 3: Gas Ar
MFC Size: 200sccm (Unit 1660)
Line 4: Gas CF4
Line 5: Gas N2
Line 6: Gas O2
Line 7: Gas CF4
Line 8: Gas H20
EMCP*01 Part list:
(1) Transporter Exit loadlock: DSQ Chamber with 8″ Paddle
(1) Transporter APM Chamber: (2) APM DI nozzles, N2 splayer
(1) Transporter Wafer alinger universal
(1) Main chamber Electrostatic chuck type: 8″ Bi-polar ESC
(1) Main chamber Pressure manometer: Millipore 100mT
(1) Main chamber End point detector: Heated port with dual channels (261.8nm/ 703nm)
(1) Main chamber Matchers: Auto tuner/ T Matcher for upper, (8) Turn RF coil matcher for Bias
(2) Main chamber Generators on board: AE-1250 For upper and bias chamber
(1) Main chamber Helium back side: Cooling 50sccm UPC (Unit 8130)
(8) Main chamber ADIO Boards
(1) Main chamber Main board
(1) Main chamber ESC Power supply
(2) Main chamber (16) Channel heater controllers
(1) PLL Chamber Paddle: 8″ Heated paddle
(1) PLL Chamber WVDS Auto fill WVDS controller
(1) PLL Chamber Vapor controller: TYLAN 500sccm H2O Controller
(1) PLL Chamber RF Generator on board: AE-1250
(1) PLL Chamber Heater controller: 853-015771-001
(1) PLL Chamber Spinner 853-015759-102
Currently warehoused
2000 vintage.
LAM RESEARCH TCP 9600 SE是一種蝕刻器，或稱為asher，設計用於半導體生產過程。這種蝕刻器是專門為化學、物理和磨料蝕刻工藝而設計的。它是一種全自動濕蝕工具，具有可編程的加工室、液體輸送設備和高度可靠、耐用和堅固的機械系統。它有一個250毫米x 250毫米的加工室，可以同時處理介電和金屬基板。LAM RESEARCH TCP 9600SE配備獨特的噴射淋浴輸送裝置，提供卓越的蝕刻選擇性和均勻的蝕刻結果。它還有一個集成的密封工藝室，能夠快速、高效地潤濕晶圓和蓋板。該工藝室保持在受控壓力、溫度和濕度，以便產生優異的蝕刻效果。此外,TCP 9600 SE還設計了一種先進的控制機器,可在整個過程中精確控制蝕刻參數。此工具可編程為從20多個不同的過程參數點收集數據。然後,這些數據可用於仔細監控蝕刻參數,從而實現優化的蝕刻結果。此外,TCP 9600SE還提供多種安全功能。集成的腔室壓力和溫度傳感器，連同腔室的幹式排氣資產，可以幫助確保人員的安全和產品的完整性。LAM RESEARCH TCP 9600 SE還具有眾多的安全聯鎖，包括工藝室保護和最大流量敏感聯鎖。LAM RESEARCH TCP 9600SE與大多數蝕刻化學體系兼容，包括KOH、TMAH、四乙基氫氧化銨（TEAOH）和氫氟酸。也可與Si、GaAs、氧化鋁等多種基材搭配使用。TCP 9600 SE旨在用於半導體生產過程,提供卓越的蝕刻選擇性、均勻性和安全性。它是為廣泛的基材材料和蝕刻化學設計的，允許優化的蝕刻結果。
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