二手 LAM RESEARCH TCP 9600 #293762298 待售

Metal etcher, 8" (3) RFG 1251 Generators ADIXEN / ALCATEL 1300 Turbo pump ADIXEN Turbo controller VAT 65 Gate valve VAT PM-7 Controller ESC Clamping Dual endpoints: 703 nm and 520 nm Bulk head mounting Hine indexer Closed loop RF Match: Upper TCP, lower mini match, DSQ Match DSQ: Hinged WVDS: Auto fill STEC 7440 MFCs APM: Standard Gases: Gases / SCCM CL2 / 200 BCL3 / 100 SF6 / 100 N2 / 50 N2 / 1000 AR / 100 O2 / 1000 CF4 / 200 H2O / 500.