二手 MATTSON Aspen II #9230723 待售

ICP System, 8" Wafer type: Silicon Chamber type: Rear chamber: ICP Chamber Cool chamber Mainframe options: Cassette nest: SMIF Cassette nest Operator interface: Operator interface, 18" with SMIF Paddle selection: Adjustable paddle Panel / Skin color: White Sub-frame: Tall frame Light tower: Pole mount, (4) colors Wafer sensors: Cassettes & paddle sensors standard silicon Paddle O-rings: KALREZ Slotted groove slit door type without regulators Loadlock manometer: 100 Torr Shuttle manometer: 1000 Torr Hinged cooldown chamber Cooling chamber skin Remote operator interface panel Rapid cassette exchange System skins for sub-frame & AGV: Standard skins for TALL sub-frames with EMO No wafer mapping No secondary interface PCB SMIF Option PCB Part: V VERSA COM +4 No robot safety enclosure SECS / GEM-1 Interface: VERSA COM +4 Gas panel type: Top of short frame Cabinet with door Gas panel facilities: Bottom gas feed with CDA regulator Mainframe exhaust options: Ceiling exhaust flange for external hookup & ductwork Vacuum fitting connections: KF50 Vacuum connections standard Shrouded locking EMO type EMO Button guard ring Panel interlock options: Mechanical interlock switch Chamber configurations: Temperature control: Watlow temperature control panel standard ACX 1201 Pressure control with ext PS No MATTSON endpoint system MFC Type: MFC on Core MFC Cal gas: N2 Gas delivery options: Gas 1 / 10000 / O2 Gas 2 / 200 / CF4 Gas 3 / 5000 / N2 RF Components: RF Match: TRAZAR AMU10-D2 (2) RF Generator racks: ENI / RFPP / ADTEC class B generators Generator type: ENI OEM12B Power supply: 208 V, Single phase Cable length: 60" RF Cables with cesar 1312 gens MFC With core chamber Installed: Heater jackets on isolation valve, throttle valve & foreline HEPA Mini-environment with blower & ULPA filter Bracket sensor lift pin (Up / Down), 062-00017-00 Bracket sensor side slit door (Bottom / Upper), 053-00018-00 & 053-00011-00 Pneumatic manifold (4) stations: 2-4 Ports (Middle) 3-8 Ports (Lower) Regulators, 0-150 PSI With gauge for slit doors & lift pins up / Down Power supply: Line frequency: 50/60 Hz Line voltage: 200/208 VAC, 3 Phase, 60 Amp, (5) Conductors AC Power: Mainframe AC box, 208 V, Single phase CE Marked.