二手 MATTSON Aspen II #9398659 待售

ICP System, 8" MATTSON Endpoint detection system With fixed filters: 430 and 520 Cable length: 19 ft (3) RF Cables and signal cables (2) Heaters MFC Chambers: Back chamber: 366 MHz CPU: Analog in and PCB out Floppy Disk Drive (FDD): DI/DO Cards Chassis: Power supply Gas channel: Bottom feed channel Cool down station: No water cooling Gas lines Right chamber: 366 MHz CPU: SEC II Card Floppy Disk Drive (FDD): Robot stepper (SMC-PC3) Chassis: Backing plain Gas channel: Junction box Cool down station: Lexan plates Gas lines with filters Front end: 26" Opening with separate operator interface 4-Color light tower Operator / Engineering monitor: TFT Design monitor Gas box with sub frames EMO Buttons Interlock circuit: Push button switches Hanging panels Load lock: Single load lock (2) Cassette stations Capability of queuing lots Pin search assembly: Proximity sensors Load lock seal: Lip seal Platform and cassette: (4) 25-Slot cassettes Rotating cassette nests, 8" Cool down station: Flat cool down station without water lines Load lock fast exchange Transfer robot: Main robot: 3-Axis robot with flex cable Robot arm: (4) Adjustable paddles with standard arm Slit door Wafer sensors: Paddles, front and rear cassettes Shuttle: 26" Process module: Chamber right and back: Tube type: Quartz tube Standard process window ICP Chamber O-ring type: Flurosilicon Temperature controller: WATLOW 988 / EZ Zone Thermal couples: Spring loaded TC Lift pin assembly Grids / Guide rings: Extended guide ring Electrical feed through Manifold and ceramic parts Isolation valve Top plate Load lock Chamber Pressure controller: VAT Valve pressure controller Chamber manometer: 10 Torr Load lock manometer: 100 Torr Shuttle manometer: 1000 Torr RF / MW System: RF System: Top RF 13.56 MHz (3) RFPP10 RF Generators: (2) Power cables missing TRAZER AMU 10D-2 RF Top match, P/N: 914-92003-00: (2) Vacuum capacitors missing Re-silvered RF coils (125) RF Vacuum caps: 100PF AC Box: 2-3 Phase generators with safety cover DC Box Gas system: Gas VCR gasket: Stainless steel and Nickel Gas line / Gas / Range Gas 1 / O2 / 1000 SCCM Gas 2 / N2 / 1000 SCCM Gas 3 / N2/H2 (4%) / 2000 SCCM Gas 4 / CF4 / 100 SCCM Side: Gas 1 / O2 / 5 SLM Gas 2 / N2 / 1 SLM Gas 3 / CF4 / 200 SCCM Gas 4 / O2 / 1 SLM Rear: Gas 1 / O2 / 10 SLM Gas 2 / N2 / 1 SLM Gas 3 / CF4 / 200 SCCM Gas 4 / O2 / 1 SLM.