二手 NORDSON MARCH AP-1000 #9156324 待售

Plasma cleaning system PLC Controller with touch screen Graphical interface Real time process representation Part carriers either direct or downstream plasma mode Automatic impedance RF generator: 13.56 MHz Proprietary software control system Production data for statistical process control Effective footprint: Clearances: Right, Left: 153 mm (6 in) Front: 680 mm (26.8 in) Back: 483 mm (19 in) Minimum Chamber: Dimensions: 457W x 610D x 457H mm (18W x 24D x 18H in) Volume: (127) Liters (7776 in³) Variable electrode configurations: Direct Downstream HTP Wide HTP Narrow (14) Shelf positions Shelf pitch: 25.4mm (1 in) for 600W 50.8mm (2 in) for 1000 W Electrodes: Powered electrode dimensions : 349W x 425D mm (13.74 W x 16.73D in) Ground (perf.) electrode dimensions: 384W x 425D mm (15.1W x 16.73D in) Floating shelf dimensions: 349W x 425D mm (13.74W x 16.73D in) RF Power: Standard wattage: 600W Frequency: 13.56 MHz Gas control: (4) MFCs Remote interface: Software controls: Plasma link Process link Vacuum pump: Standard vacuum pump: 50 CFM (50 / 60Hz) Wet pump with oil mist eliminator Facilities: Power supply 220V, 25A, 50/60 Hz, 3 phase, 8AWG, (4) Wires 380V, 25A, 50/60Hz, 3 phase, 8 AWG, (5) Wires Process gas fitting size and type: OD Swagelok tube: 0.25-in Purge gas fitting size and type: OD Swagelok tube: 0.25-in Pneumatic valves fitting size and type: OD Swagelok tube: 0.25-in Purity: Industrial grade nitrogen or CDA Industrial grade or better Pressure and flow: Regulated from 0.69bar (10PSI) min. to 1bar (15PSI) max Regulated from 2bar (30PSI) min. to 5.5bar (80PSI) max Regulated from 3.4bar (50PSI) min. to 5.5bar (80PSI) max CDA Oil free Dewpoint: <=7°C /45°F Particulate size: <5 Micron Exhaust: OD Pipe flange: 38mm (1.5 in.) Compliance: SEMI: S2, S8, E10 International: CE Marked Ancillary equipment: Gas generators Nitrogen Hydrogen Facilities modules: Oil filtration Chiller Scrubber Currently installed 2012 vintage.