二手 NOVELLUS Gamma Express #293618750 待售

Stripper / Asher, 12" Wet process OHT PIO Sensor FOUP Carrier (3) Carrier stages GEM / CIM JGJ Earth leakage breaker Signal tower: Red / Yellow / Green / Blue EMO: Front (2) Rears Interconnect hardware: PM to pump 50 ft Interconnect cables: TM to subpanel 100 ft MDP Power box External interlocks MF: Gamma 2130 upgrade to gamma express Etch chamber: Gamma 2130 / Position 1 to 6 RF Cable length: RFG to matcher, 30 ft MKS GHW-50A Generator Maximum power 5000 W + RF Match COMET 5 kW HI-THLD (XPR type) Standard chamber kit Wafer lift mechanism: Fin O-Rings: Fluorosilicon / TEV Gate valve: Barrier seal door Gas system type: (4) Gases FOUP / ATM Robot / 3 FOUP Backend / YASKAWA MP2300i controller Cassette ID: Hermos carrier ID User interface options: Side and front monitor UI Conditioning station (2) Monitors UPS Gas no / MFC Model / Gas / MFC Size 1 / STEC SEC-Z500 / SEC-Z512/Z522 / O2 / 50 SLM 2 / STEC SEC-Z500 / SEC-Z512/Z522 / N2 / 7 SLM 3 / STEC SEC-Z500 / SEC-Z512/Z522 / 4%H2N2 / 20 SLM 4 / STEC SEC-Z500 / SEC-Z512/Z522 / CF4 / 50 SCCM Does not include: Dry pumps Hard Disk Drive (HDD) No monitor (Windows) Lamp and lamp holder non-functional.