二手 OXFORD Plasmalab 100+ ICP 380 #293769565 待售
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ID: 293769565
晶圓大小: 6"-8"
Reactive Ion Etcher (RIE), 6"-8"
X20 PLC Upgraded
Process: Ar, O2
Hine robot
25-Slots cassette module
Gases: O2, CHF3, CF4, SF6, Ar, C4F8, BCL3, CL2
94-815269 CH1 RIE System (In system)
94-815269 CH2 ICP System
94-EXP1513 Monitor, PC, Cables
94-815269GP Gas pod
Handler
Power supply: 415 V, 3 Phase.
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