二手 PLASMA ETCH PE-100 #293731022 待售

ID: 293731022
Plasma etcher Generator: 300 W, 100 KHz No chiller Control system: Process sequencing Mass flow controller gas control: 0-50 cc Vacuum gauge: 1-2000 mT Vacuum pump: 8CFM 2-Stage direct drive oil pump with oil mist coalescing filter 6061-T6 Aluminum chamber Chamber dimensions: 12" x 14.5" x 12" Power supply: 120/240 V.
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