二手 PLASMATHERM SLR 770 #9407588 待售

Inductively coupled Plasma (ICP) Etcher, 6" Controller type: PC Upgraded ICP Process Module (PM) High power ICP Applicator Lower electrode, φ 10" Ceramic wafer clamp Helium backside cooling Load lock chamber with linear robotic arm Load lock arm with programmable stepper motor and controller Gas distribution box with 4 Gas channels MKS 1479 Metal sealed mass flow controllers Option: 4 Gas channels (2) RFPP AMNPS-2A Auto matching network controllers RFPP RF5S RF Generator: 500 W at 13.56 MHz RFPP AMN-5 500 W Auto matching network RFPP RF20M RF Generator: 2000 W at 2.0 MHz RFPP AMN-20 2KW Auto matching network SHIMADZU TMP1003 MAG LEV Turbo pump with controller VAT 64 Rectangular throttle valve with VAT PM5 Controller INFICON MPG500 Ion gauge on ICP Chamber MKS 325 Moducell Pirani gauge on load lock WATLOW Three zone chamber heater controller EDWARDS QDP80 Dry roughing pump on process module AGILENT DS 302 Mechanical pump on load lock SMC HRR018 Rack mount chiller; 5°C - 45°C Temperature range Analog and Digital I/O Modules controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications protocol Pneumatic valves controlled by SMC Modules via Modbus TCP/IP Communications protocol PC: UBUNTU LINUX OS Intel I7 CPU at 3.4 GHz 16 GB RAM 500 GB SSD SMC Pneumatic valves Standard flat panel monitor, 2" Keyboard Mouse Electrical disconnect box - 208 VAC, 60 Hz, 3-Phase.