二手 SAMCO RIE-400iPB #293682703 待售
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ID: 293682703
優質的: 2009
Dry etcher
Reaction chamber Inner diameter: φ 320 mm x φ 37 mm
Viewport (one on the right side)
Lower electrode temperature: Constant temperature circulation device (20°C~25°C) Rubber heater
2-turn coil lower electrode: φ106 mm
Gases: CHF3, O2, Ar, C4F8, SF6
ICP: 13.56 MHz (max 1 kW), bias 13.56 MHz (max 300 W)
Power supply: 200 V, 60 A, 3 Phase, 60 Hz
2009 vintage.
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