二手 SEZ / LAM RESEARCH Spare parts for RST 101 #9268917 待售
網址複製成功!
ID: 9268917
Qty / Part number / Description
(2) / 2000615-00 / Sensor pressure switches, ISE2
(2) / 2001874-00 / Amplifiers, AC motor, MCOM-DC-AMP-plus
(1) / 2002607-00 / Bearing unit, COLUMBUS Stepper motor
(1) / 2002974-00 / Base 6" left (Pick and place)
(3) / 2005374-00 / Covers for vacuum channel, 6", short for fork
(2) / 832-125216-001 / AC servo motors, M863-8/20
(1) / 2007004-00 / 6" Chuck with N2 hole, 6-pin, PETP cover
(4) / 2012858-00 / Tube carrier-inserts 1/2" for 1 HEX
(2) / RB000004-00 / Spindles for linear table
(4) / RB000005-00 / Linear guides for linear table
(2) / 2004990-00 / Boards, processor MCOM I1Xa
(2) / 2004994-00 / AB1-MCOM-Z80-00051 - Z80
(4) / 2000599-00 / Pressure springs, VD-052G A2
(1) / 2015432-00 / Motor DC 3557, Gear 5/1, Enc, Linedrv
(2) / 2013555-00 / Sensor exhausts SIGMAMELTEC hPa
(1) / 200656-00 / Encoder HG608KR
(1) / - / Encoder DGS65
(2) / 2003019-01 / Block brakes
(2) / - / Return tubes for chamber, Med2, Med3
(1) / - / Power supply, 24 V, 27 A
(1) / 2001654-00 / Power supply unit, 36 V, 8 A
(2) / 2004008-00 / Stepper motors P430-A14
(1) / - / Power supply, 12 V, 5 V, 5 V, 13 V
(6) / - / Pressure measurements, Mpa
(6) / - / Switches, EMO
(3) / 2010013-00 / Control board stepper motors, EDM-453
(2) / EB2-RST-VSPAP-INT3 / Front side pick and place
(2) / 2000522-00 / Cards, DIGI PC/4E 4x Serial quad DB-25
(3) / 2001578-00 / Cards, motion control, variable PWM frequency
(1) / 2001036-00 / Card, input 1.0, 2.0 for chemistry system
(4) / 2004025-00 / Controllers, stepper motor, 1.0 A
(6) / 2000504-00 / Control board stepper motors, 30 V, 2 A
(5) / - / HEDS5120-A11 Encoder discs
(3) / 2000507-00 / Cards, DC driver, 16 out, 50 V, 1 A
(3) / 2004991-00 / Z80-Processor interface
(1) / - / Electronic card
(1) / 2005589-00 / Card, Optocoupler interface, 16" / 4+4 Out.
還沒有評論