二手 TEGAL 901e #68489 待售

etcher, 3"-6" Includes: ENI ACG-10 RF Generator (1000 Watt) DEC monitor station Chart recorder Mass flow controllers with certified calibration sheet Pressure controller with certified calibration sheet Heated baratron with certified calibration sheet Upgraded pressure manifold with Nupro valves Upgraded gas manifold with Nupro valves Top plate chuck interlock Vacuum valve RF interlock Restoration: New Stepper motors New Cylinders NewUpper electrode Chemically clean upper ceramic insulator 5” lower electrode (chuck) Install new 5” Al chuck ring Install new 5”super spatula assy’s Install 5” super tine assy. Install new quartz pins Install new collar pins Install new metering valves Install new flexible gas lines Rebuild chuck cylinder Rebuild pin cylinder Install new flow switches SST Install new standoffs Install new safety covers Install new bellows HPS angle valve Install new seals and O-rings, process chamber assy Install bearings Install new sapphire rod Install new fiber optics Install new sensor PCB Install new tubing Install new capacitive sensors Install new RF cables Install new variable caps TEGAL chiller is available for an additional cost.