二手 TEL / TOKYO ELECTRON Indy-B-L #293637439 待售
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ID: 293637439
晶圓大小: 12"
優質的: 2012
LPCVD Furnace, 12"
Wafer type: Si semi STD Notch
(100) Production wafers
Maximum operating temperature: 500-1000
N2 Load lock
Boat type handling position
O2 Density control for N2 Load lock
N2 Boat shower wafer cooling
560A Furnace temperature controller
VMM-56-002 Heater
Wafer / Carrier handling:
(25) Carrier type: FOUP
ENTEGRIS A300
Carrier stage capacity: 16
Pin pad A, B
Fork material: Al203 and peek
W/T Type: 1+4 Edge grip
W/T Auto teaching
Furnace facilities:
Furnace exhaust connection point: Top connection
Cooling water connection point: Bottom connection
Gas specification:
IGS 1.5" W-seal rail-mount
FUJIKIN IGS
Tubing bend bend (Less than 90°)
HORIBA STEC
Incoming gas connection point: Bottom connection
Gas vent connection point: Bottom connection
Gas unit exhaust connection point: Bottom connection
Process gas exhaust connection point: Bottom connection
Exhaust specification:
MKS Vacuum gauge-press controller
MKS Vacuum gauge-press monitor
MKS Vacuum gauge-pump monitor
CKD-VEC Main valve
Condenser
Reactor specification:
Tube material: Quartz (outter), quartz (inner)
Inner tube Type (LP): Straight
Inner T/C: Outer tube inferior (wall type)
Tube sealing: O Ring
Soft backfill injector
Boat type: (117) Slots, pitch, 8 mm
Boat rotation
Pedestal type: Quartz
No shutter purge type
Interface specification:
Host communication: Comply with GJG
Equipment host I/F connection: Gas box top HSMS
Ingenio
OHT Capability
Load port operation: Upper
PIO I/F Location: FNC Top
HOKUYO DMS-HB1-Z PIO
RF Carrier ID reader writer type
CIDRW L/P: Read and write
ASYST ATR 9100 CIDRW
TEL CIDRW
User interface
Signal tower model: Customized
Signal tower colors (From the Top): Red / Green / Yellow
Signal tower location: Front
Front operation panel
MMI and gas flow chart: Gas box and front operation panel installed
Indicator type: Superset
Operator switch: Operator access / orange
Pressure display unit (gas inlet / vacuum): Mpa / Pa
Cabinet exhaust pressure display unit: Pa
Gas leak detector:
Gas1 / SiH4
Gas2 / PH3
Gas3 / ClF3
Cable length:
FNC-Power box: 20 meter
Power box -refill system: 30 meter
Power specification:
Voltage: 208 VAC, 3 Phase
Phase connection type: Star connection
Voltage single-phase: 120 VAC
Single-phase connection type: Grounded
Frequency: 60 Hz
Power cable input entrance location: Power box top
2012 vintage.
TEL/TOKYO ELECTRON Indy-B-L是一種蝕刻器（又稱asher），用於制造半導體器件。它是建立在自動化平臺上的單晶片設備，提供高精度。它有一個加載/卸載系統，可以處理超過300晶圓/小時，確保快速和準確的處理，同時保持最高產量。TEL INDY B L的設計采用了堅固可靠的設備,可為要求最苛刻的制造提供極高的生產效率和準確性。TOKYO ELECTRON INDY B-L帶有一個直接驅動負載端口，可最大限度地減少循環時間並確保穩定的蝕刻條件。它還有一個晶片處理機，確保晶片被牢固地固定，以便安全地轉移到加工工具上，並防止在處理過程中失調或斷裂。TOKYO ELECTRON Indy-B-L先進的控制工具和全面的消息中心提供了對蝕刻過程的實時洞察,有助於確保最佳效果。TEL/TOKYO ELECTRON INDY B L擁有先進的露天技術，具有多種蝕刻配方。這使得每個晶片上的性能和質量一致，並且允許蝕刻器用各種氣體和介質進行蝕刻。TEL/TOKYO ELECTRON INDY B-L還有一個集成的過程分析模塊，允許實時進行過程監測，以確保最佳結果，同時防止任何過度蝕刻。除了這些功能外，TOKYO ELECTRON INDY B L還提供了廣泛的定制規格，以適應客戶的需求。TEL Indy-B-L提供各種尺寸和設計,可針對各種介質進行配置,並提供現場清潔功能。Indy-B-L也有很寬的溫度範圍，允許精確和均勻的過程。總體而言,TEL INDY B-L是一種蝕刻器,提供卓越的性能和質量,同時提供更高的產量和更快的周期時間。其廣泛的特性和定制配置使其成為半導體制造的理想解決方案。
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