二手 TEL / TOKYO ELECTRON Indy Plus #293627608 待售

TEL / TOKYO ELECTRON Indy Plus
ID: 293627608
晶圓大小: 12"
優質的: 2010
Furnace, 12" Process: ALDZROX Reactor: Boat rotation Furnace: Loading area light: White (LED) Wafer / Carrier handling: Fork material-Al2O3 + Peek Facilities: Furnace exhaust connection poi: Top connection Cooling water connection point: Bottom connection Furnace (Exhaust / Box, Gas / Box: Main-Fab) Power box: Sub-Fab Gas distribution system: IGS Type: IGS 1.125" W-seal rail-mount IGS Maker: FUJIKIN Tubing bends: Bend (Less than 90°) IGS Final filter-PALL IGS Regulator: CKD IGS MFC: AE / Digital IGS Press transducer: NAGANO Gas facilities: Gas VENT connection point: Bottom connection Exhaust VENT connection point: Bottom Connection Gas unit exhaust connection point: Top connection Process gas exhaust connection: Bottom connection Exhaust : Vacuum gage: Press control: MKS (Hot) Capacitance manometer Press monitor: MKS (Hot) Capacitance manometer Pump monitor: MKS (Hot) Capacitance manometer Main valve-CKD-Hi-speed VEC Vacuum pressure controller: CKD-VEC Heater model: Low temperature VMM-56-201 4 Zone/150-600C Without RCU Interface specification, Factory automation system: Carrier ID reader writer type: RF CIDRW Lower load port: Read Interface: Signal tower model: LOUGWB-24-4 Tower as follows: LOUGWB-24-4 (2) LOUGWB-24-3, Default = 1 Signal tower colors: Red / Yellow / Green / Blue Tower as follows: Red / Yellow / Green / Blue (2) Red / Yellow / Green Signal tower: Front Front operation panel MMI and gas flowchart: Gas box and front operation panel Indicator type: Superset Operator switch: Operator access / Orange (Standard) Pressure display unit: MPa / Torr Cabinet exhaust pressure display: Pa No auto shutter Does not include Hard Disk Drive (HDD) 2010 vintage.
TEL/TOKYO ELECTRON Indy Plus是一款功能強大的蝕刻器/asher,用於半導體工業中,用於加工各種尺寸的晶片。這款Asher配備了最先進的觸摸面板和節能設計,可降低電氣成本並支持快速加熱和冷卻。它還有存儲在內存中的多種配方。TEL INDYPLUS能夠進行400mm和300 mm晶圓處理,尺寸從2到8英寸不等。它提供了廣泛的加工選擇,包括Cl2-based高密度離子束蝕刻,灰,蝕刻和灰,多晶矽膜蝕刻和薄膜沈積。TOKYO ELECTRON INDY PLUS還有一個混合型靜電卡盤,提供了改進的基板灰度均勻性,並設計為優化蝕刻和灰度效率。它的機械臂使晶圓能夠快速傳輸。它配備了一個紅外加熱控制系統,旨在通過保持加工室內的溫度來減少變化。TEL/TOKYO ELECTRON INDYPLUS使用特殊的數位薄膜厚度控制器,提供精確的重復性和改進的蝕刻/灰度輪廓。它還具有多種安全功能,包括室內回氣監測器、超壓安全閥和安全聯鎖裝置。除了這些特性之外,INDYPLUS還有一個專門的采樣室,用於先進的濕式板凳加工。這為測試和測量高探針和控制的特性提供了一個幹凈的環境。INDY PLUS是一款入門級、經濟實惠但功能強大的蝕刻解決方案,可滿足半導體行業的各種制造需求。它用戶友好,具有較高的吞吐量和精確的結果,非常適合不同類型晶片的大容量處理。
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