二手 TEL / TOKYO ELECTRON Indy Plus #293627608 待售
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ID: 293627608
晶圓大小: 12"
優質的: 2010
Furnace, 12"
Process: ALDZROX
Reactor: Boat rotation
Furnace:
Loading area light: White (LED)
Wafer / Carrier handling: Fork material-Al2O3 + Peek
Facilities: Furnace exhaust connection poi: Top connection
Cooling water connection point: Bottom connection
Furnace (Exhaust / Box, Gas / Box: Main-Fab)
Power box: Sub-Fab
Gas distribution system:
IGS Type: IGS 1.125" W-seal rail-mount
IGS Maker: FUJIKIN
Tubing bends: Bend (Less than 90°)
IGS Final filter-PALL
IGS Regulator: CKD
IGS MFC: AE / Digital
IGS Press transducer: NAGANO
Gas facilities:
Gas VENT connection point: Bottom connection
Exhaust VENT connection point: Bottom Connection
Gas unit exhaust connection point: Top connection
Process gas exhaust connection: Bottom connection
Exhaust :
Vacuum gage:
Press control: MKS (Hot) Capacitance manometer
Press monitor: MKS (Hot) Capacitance manometer
Pump monitor: MKS (Hot) Capacitance manometer
Main valve-CKD-Hi-speed VEC
Vacuum pressure controller: CKD-VEC
Heater model:
Low temperature VMM-56-201 4 Zone/150-600C
Without RCU
Interface specification, Factory automation system:
Carrier ID reader writer type: RF
CIDRW Lower load port: Read
Interface:
Signal tower model: LOUGWB-24-4
Tower as follows: LOUGWB-24-4
(2) LOUGWB-24-3, Default = 1
Signal tower colors: Red / Yellow / Green / Blue
Tower as follows: Red / Yellow / Green / Blue
(2) Red / Yellow / Green
Signal tower: Front
Front operation panel
MMI and gas flowchart: Gas box and front operation panel
Indicator type: Superset
Operator switch: Operator access / Orange (Standard)
Pressure display unit: MPa / Torr
Cabinet exhaust pressure display: Pa
No auto shutter
Does not include Hard Disk Drive (HDD)
2010 vintage.
TEL/TOKYO ELECTRON Indy Plus是一款功能強大的蝕刻器/asher,用於半導體工業中,用於加工各種尺寸的晶片。這款Asher配備了最先進的觸摸面板和節能設計,可降低電氣成本並支持快速加熱和冷卻。它還有存儲在內存中的多種配方。TEL INDYPLUS能夠進行400mm和300 mm晶圓處理,尺寸從2到8英寸不等。它提供了廣泛的加工選擇,包括Cl2-based高密度離子束蝕刻,灰,蝕刻和灰,多晶矽膜蝕刻和薄膜沈積。TOKYO ELECTRON INDY PLUS還有一個混合型靜電卡盤,提供了改進的基板灰度均勻性,並設計為優化蝕刻和灰度效率。它的機械臂使晶圓能夠快速傳輸。它配備了一個紅外加熱控制系統,旨在通過保持加工室內的溫度來減少變化。TEL/TOKYO ELECTRON INDYPLUS使用特殊的數位薄膜厚度控制器,提供精確的重復性和改進的蝕刻/灰度輪廓。它還具有多種安全功能,包括室內回氣監測器、超壓安全閥和安全聯鎖裝置。除了這些特性之外,INDYPLUS還有一個專門的采樣室,用於先進的濕式板凳加工。這為測試和測量高探針和控制的特性提供了一個幹凈的環境。INDY PLUS是一款入門級、經濟實惠但功能強大的蝕刻解決方案,可滿足半導體行業的各種制造需求。它用戶友好,具有較高的吞吐量和精確的結果,非常適合不同類型晶片的大容量處理。
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