ID: 293819984
晶圓大小: 12"
優質的: 2014
Reactive Ion Etcher (RIE), 12"
Process: MHM Trench
Nitrogen purge storage
Controller
YASKAWA XURC845M-C00 Loader module
(3) FOUPs
(6) VIGUS Ix BSP chambers
No TM Robot controller
No PM1 TMP Controller
No PM1 Lifter pin driver
2014 vintage.
