二手 TEL / TOKYO ELECTRON TE 8500S #9194477 待售

Oxide etcher Wafer type: Notch Chuck type 1: Polymide Chuck type 2: M-Type Caassette: 6" Cassette Monitor type: LCD Signal tower: PATLITE SLF-V Visual: R / Y / G / B Wafer transfer module: Transfer robot: Load lock 1,2,3 / 6" or 8" Transfer robot motor: R-Motor, E-motor (L/L 1,2,3) Transfer robot driver: R-Driver, E-driver (L/L 1,2,3) Process module 1: APC Valve: TYLAN MDV-108 APC Heater & heater controller: Heater type Matcher: DAIHEN MFM-20SA Power splitter: DAIHEN MFT-20SB C/M (Baratron): 10 Torr vaccum general CMLA-11 B.P He Control (Edge): C/M (Baratron): TYLAN CMLA-21 100 TORR PCV Unit / He controller: AERA PV-104C MFC: SEC-4400RC TMP: SEIKO SEIKI STP-H600C1 GAP Gas module: P/C1 MFC / Gas1 (name/range/maker/model): CHF3 / 200 SCCM / STEC / SEC-7440MC MFC / Gas2 (name/range/maker/model): CF4 / 200 SCCM / STEC / SEC-7440MC MFC / Gas3 (name/range/maker/model): AR / 2 SLM / STEC / SEC-7440MC MFC / Gas4 (name/range/maker/model): HE / 1 SLM / STEC / SEC-7440MC MFC / Gas5 (name/range/maker/model): N2 / 100 SCCM / STEC / SEC-7440 Generator: DAIHEN MFG-20SA P/C Power Chiller: LASEM TECH BCU-L152 Chiller Chiller type: Dual Pump: P/C Pump: EDWARDS IQDP80 L/L Pump: EDWARDS IQDP80 EPD: JOBIN YVON H-10VIS 1996 vintage.