二手 TEL / TOKYO ELECTRON Unity IIe #9093721 待售

Dry etcher, 8" Configuration: Unity 2 DRM Chamber type: DRM Software version: Ver 3.61-Rev 212 Wafer type: Flat Main body type: Wide Chamber: 2-Chamber Robot type: Yaskawa/Twin arm Robot drive: Yaskawa/VS2A Robot drive: Yaskawa/Vosh Pendulum valve: VAT/65046-PH52 Isolations V/V: Present Pressure gauge: MKS/627A-13614-S TMP1: Seiko Seiki/STP-1303W1 TMP2: Seiko Seiki/STP-1303W1 TMP Con't1: Seiko Seiki/STP-1303W1 TEMP Con't2: Seiko Seiki/STP-1303W1 Generator1: ENI/OEM-25B-01 Generator2: ENI/OEM-25B-01 Matcher1: ENI/MWD-25LD Matcher2: ENI/MWD-25LD Chiller1: SMC INR499-201 Gas: 8-Line STEC/Aera B.HE (CNT): STEC/SEC-7440 B.HE (Edge): STEC/SEC-7440 Main controller: ISA SLOT1 NE2000 PLUS3N-2 Present ISA SLOT2 IBX4101 Present ISA SLOT3 EMPTY Present ISA SLOT4 AT-BCN/A Present HDD(SYSTEM) Present HDD(DATA) Present VME slot 1 SVA 004a Present VME slot 2 SVA603 Present VME slot 3 MVME612 Present VME slot 4 GST-M-SET-312 Present VME slot 5 TVB0002 Present VME slot 6 TVB0010-1 Present VME slot 7 TEB102-1 Present VME slot 8 EMPTY VME slot 9 TVB0008 Present VME slot 10 TEB3101-1 Present TYB221-1/PUMP Present TYB415-1/RF Present TYB212-1/RF Present TYB416-1/PUMP Present TYB414-1/CONT Present TYB425-1/INT Present P/C1 Controller: Slot 1 APC(PB-2) Present Slot 2 TYB112-1/DIO Present Slot 3 TYB111/MAIO Present Slot 4 TYB121/COM Present Slot 5 TYB121/COM Present Slot 6 TEMP Present Slot 7 EMPTY P/C2 Controller: Slot 1 APC(PB-2) Present Slot 2 TYB112-1/DIO Present Slot 3 TYB111/MAIO Present Slot 4 TYB121/COM Present Slot 5 TYB121/COM Present Slot 6 TEMP Present Slot 7 EMPTY T/C Controller: Slot 1 COM Present Slot 2 TYB112-1/DIO1 Present Slot 3 TYB112-1/DIO2 Present Slot 4 TYB112-1/DIO3 Present Slot 5 MAIO Present Slot 6 TYB131-1/ILK Present Gas Box module: TYB 211-A/GAS(1) Present TYB 211-A/GAS(2) Present 1998 vintage.