二手 AIRCO TEMESCAL FC 3200 #175666 待售
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ID: 175666
Thermal evaporation system
Dual electron beam
Process chamber: 32" x 32", water-cooled
Flat planetary: 10.6", high speed
Control system: GE Fanuc PLC
Integrated cryo pump regeneration
Process recipe control
Data logging
Onboard flat screen integrated Windows PC
GE Fanuc PLC control system: Windows based PC with keyboard and trackball mouse
General Electric Cimplicity HMI Software
Operator / Engineer computer interface includes:
Data logging of: Ion & Convectron, valves & chamber heat
User level system control
Integrated cryo pump regen control
Process recipe editing
All required software programming
(2) Telemark TT-6, digital display and programmable sweep control
(2) single pocket Temescal electron Beam Guns
5KVA, SCR controlled transformer and fixturing to accept customer specified thermal evaporation boats. Feedthroughs for one resistive thermal source
(3) Separate source shutters for each source
(2) 2kw heater assemblies with feed throughs and temperature control, 4KW total
2 Ion / 4 Convectron gauge
32" x 32" S/S Process chamber (water cooled) with full opening door with viewport
VV-400 viewport with shutter, installed in lower chamber to view sources during deposition process
PLC closed loop pressure control through 02 MFC / Granville Phillips 354
Operational CTI 400 Cryo Pump with CTI 1020R compressor. PLC controlled automatic
regeneration and N2 purge gas heater
Deposition rate monitor using a Maxtek 6 mhz quartz crystal sensor, programmable
(3) planets for (4) 4" inch variable speed single plane planetary system; 12 wafers/run
Separate free standing rack for thermal power supply transformer and TT6 power units
Leybold D-30, 2 stage direct drive 26cfm mechanical pump.
AIRCO TEMESCAL FC 3200蒸發器是一種先進高效的冷卻設備，設計用於適應各種商業、工業和住宅應用。該蒸發器具有高效的直驅電機和智能數字溫度控制功能,可提供一致冷卻的最高性能。該系統以持久耐用的鋁結構建造，確保了多年的可靠運行和較低的維護成本。FC 3200使用重型、動態平衡的鼓風機，以最小的噪音產生均勻的流量，使其適合考慮聲音的空間。該裝置的蒸發器線圈采用高效的鰭片設計，采用耐冷凝鋁鰭，後塗料浸入和環氧加工線圈，以確保可靠性。這臺蒸發器還配備了微處理器控制器，可以精確控制溫度、風扇速度和其他設置。AIRCO TEMESCAL FC 3200設計簡單易用，具有集成計時器、數字回流防護器、內置空氣凈化器等多種操作特性，確保空氣一致、優質。這臺機器還設計用於易於維護,具有易於訪問的組件,便於訪問和清潔。FC 3200還配備了安全功能，確保無憂操作。該工具采用高壓切斷開關、壓力傳感器和單獨的低壓開關，以確保安全可靠的運行。此外,該蒸發器還配備了一個非易失性固態旁路開關,可控制風扇速度,同時保持蒸發器性能。AIRCO TEMESCAL FC 3200設計為節能、節省成本。這種蒸發器設計有一套隔熱分離線，防止冷凝物積聚，以節省能源和降低成本。該資產還配備了優化的鰭片間距，以實現更好的傳熱和更少的能量損失，最大限度地提高效率和性能。總體而言，FC 3200是一種可靠高效的蒸發器模型，適用於任何商業、工業或住宅應用。該設備具有耐用的鋁結構、高效的鰭片設計和智能數字溫度控制功能,可提供可靠的性能和經濟實惠的節能效果。
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