二手 AST / ADVANCED SYSTEM TECHNOLOGY Peva-600I #9263379 待售

E-Gun evaporators System frame with clad panels Mounting frames Rack cabinet for control units, 19" Mains and safety elements with emergency shut-down Deposition chamber Single walled: 304L Stainless steel and electro-polished Semi rectangular pipes dimension for cooling: 630 x 850 mm Front opening / closing door With automatic electro-magnetic lock / unlock Viewport diameter front door, 4.0" Optically reflector Shielding parts Baseplate: 6 Holes diameter, 1" High voltage Sweep signal Crucible index drive E-gun body cooling Shutter drive feed through Sidewall: Rectangular flange for HV valve: 16" x 11" KF 40 Flange for heating power feed through (3) KF 25 Flanges for thermocouple feed through and ion gauge head (3) KF 16 Flanges for venting valve and pirani gauge head 35 CF Flange Top plate: Fitting gas inlet feedthrough: 1 Hole 1" dia Rotation drive and quartz sensor feedthroughs: 1 Hole 5" dia Deposition chamber pumping system and vacuum measurement: CTI-CRYOGENICS Torr-10 Pump, 10" CTI-CRYOGENICS 9600 Liquid helium cryogenics water-cooled compressor Auto-regeneration function for cryo pump GP 307 Vacuum gauge controller: ATM ~5.0E-10 torr GP 274 Ion gauge head: 1.0E-02 torr ~1.0E-09 torr (2) GP 275 Pirani heads with tungsten filament: ATM ~5.0E-04 torr Accessories for substrate stage: Substrate carrier rotary driver Substrate carriers Substrate heating Accessories of process sources: JOEL JST-3F Electron beam evaporator Type: JEBG-203UA Source with deflection: 270° Uniform energy distribution High speed scanning Water cooling feed through X and Y Sweep signal feed through Single crucible 20 cc Remote control Shutter drive Gas inlet systems Process controller / Layer thickness measurement: MAXTEK MDC-360C Layer thickness Rate and process control unit Process control: RS-232 Interface Multi-film and multi-process storage: Up to (99) materials 2010 vintage.