二手 BOC / TEMESCAL FCE 2700 #293731083 待售
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ID: 293731083
晶圓大小: 3"-6"
E-Beam evaporator, 3"-6"
Process: Ti / Al
TRC 3460
(6) pockets
TEMESCAL Gun control
TEMESCAL Sweep Control
Simba 2 / 10kV
Substrate holder, 3” (47 wafers)
Rate controller: INFICON XTC/2
EDWARDS E2M80 + roots
EDWARDS EH250
CTI-CRYOGENICS CT-10 onboard (chamber)
CTI-CRYOGENICS CT-8 (source)
MFC gas: Argon
No loadlock
Automatic gold feeder
Cryogenic compressors are missing.
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