二手 CHA Mark 40C-RH #9390229 待售
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ID: 9390229
E-Beam evaporator
Dual operation
Moving substrates
Exceptional Film Uniformity (EFU)
Sputter up
Process stations
Round cathodes, RF or DC (Up to 4-stations)
Co-deposit
Bias, RF or DC
Substrate heating, 400°C, multi-element
Substrate heating station
Electron beam
Thermal
Ion beam pre-clean / Etch
Plasma texturing/etch
Cryo coil: 1,000 L/Sec
Process chamber
Insitu spectrophotometer
Drop well source
Easy access to front and rear door
Variable source-to-substrate distance
Utilities
Water supply, 10 GPM
Air supply, 85-125 PSIG
Deposition fixturing adjustable angle planet
Vertical drum with pallets
Rotating disk
Rotating dome
Flat planetary
Shutter
Pumping stack
Dry or oil sealed roughing pump
Regeneration options
Famous right angle pumping/plumbing
Exceptional pumping performance
High vacuum valve, vertical seal, 16"
Foreline and roughing valves, vertical seal, 3"
Large refrigeration vapor pumping options
Mechanical pump, minimum CFM
Molecular sieve trap
Cold trap LN2, 25L pump trap, optional water pump
LN2 level control
Ionization gauge control
Gas controls
Pumping options:
Cryo
Turbo
Diffusion
Ultimate vacuum:
System: 10^-9 Torr
Chamber:10^-8 Torr
Power supply options:
Electron beam: 6-10-15 kW
Sputtering: 1-3-5-15-30 KW
Heater: 6-10-16 kW
Thermal deposition: 1-5-10 kW.
CHA Mark 40C-RH蒸發器是一種可靠、高性能的工業蒸發器,設計用於各種工業冷卻和幹燥過程。該單元采用單級設計,外殼結構清晰,便於訪問,維護最少。蒸發器具有400升的容量,整體高度為1270mm,工作溫度範圍為-20°C至+65°C。蒸發器利用先進的軸向風機產生高質量的空氣運動,以快速、高效的冷卻過程。同軸設計通過蒸發器殼體供應空氣,由單獨的風扇產生水平流動,以保持空氣高速流出。空氣的流量是可調的,蒸發器利用R 22和R134a制冷劑來最大化效率。蒸發器還具有獨特的自潔系統,在蒸發器內部清除灰塵和其他顆粒後,才能成為空氣。CHA MARK 40C RH蒸發器還具有廣泛的安全特性,如可調節的溫度和壓力安全開關,以及緊急關機和報警功能。蒸發器安裝方便,緊湊的設計需要最少的空間。蒸發器高效可靠,設計用於低維護操作。總體而言,Mark 40C-RH蒸發器是工業冷卻和幹燥應用的理想蒸發器,提供可靠的性能和高效的冷卻過程。
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