二手 CHA SEC 1000 #107491 待售

Electron beam vacuum evaporator with AutoTech II CTI CT-10 cryopump Equipped with a 25.5" diameter Water-cooled bell jar 26" diameter stainless steel baseplate Planetary fixturing holding up to 36 4" wafers One button automation and lift-off fixturing Includes: Granville Phillips 260 Ion gauge controller Auto Tech II Valve sequence control with hoist option Base plate, stainless steel, 33" diameter Motorized Hoist MH-600 Foreline Sieve trap model KEL-170 Liquid nitrogen level control with phase separation column, LC-2/6175/V-100 Molecular sieve mechanical pump trap w/ timer control, MPT-300ST Substrate heater power supply, 10kW, SCR controlled, Model HPS-671-10 Substrate heater array, 8kW, EF75-551-8/S Independently loaded, planetary deposition fixturing, EF75-051 Including 32" diameter, water cooled, stainless steel bell jar Scissors shutter EF75-203-8 Electro-pneumatic actuator EF75-221 Serpentine cryocoil assembly w/ fill and empty control, EF75-115 Electron beam power supply, Temescal Model CV-8A-111 Electron beam source, Temescal Model STIH-270-3MB Thin film deposition process controller, Temescal Model FDC-8000 IC/5 Thin Film Deposition Controller Manual Instructions, documentation, and owner’s manual Electrical Requirement: 110-208 / 3 Phase / 60 Hz, 5 wire, 130A Water: 4.0 GPM Air: 90-110 PSI Available Options: Automatic hoist option, model 26-008 Vacuum gauging options Parts and accessories included Sealed for storage.