二手 EDWARDS Auto 306 #293755228 待售

Thermal evaporator Type: StandAlone Indium Coater Workholder: 260mm Turbo molecular pump, 250 l/s High vacuum isolation valve Liquid nitrogen cold trap, fitted below high vacuum valve RV 12 2-Stage 14.2 m³/h rotary pump Foreline trap Oil mist filter PLC operated automatic vacuum control system with touch screen display Vacuum measurement: Active penning gauge head (2) Active Pirani gauge heads PN: E09090000 Vacuum chamber FL400 Stainless steel front - loading high vacuum chamber 400mm Diameter by 500 high with viewport in chamber door With removable chamber top plate with (6) vacuum penetrations, 1" Evaportaion sources: (2) Current source clamps High current evaporation source clamps capable of holding resistance evaporation sources Tungsten basket heater with ceramic crucible (2) Extended water-cooled high current lead throughs Radiation shield: PN E09035000 LT/HT current controller with selector switch Ammeter to display evaporation current: PN E09063000 LT Transformer with two outputs: 5V, 200A and 10V, 100A Complete with (2) vacuum lead throughs and cables Source shutter: PN E09032000 Type: Manual Work holder: PN E09049000 Rotary work holder fitted in chamber top plate Aluminium work holder plate: 260mm diameter Uniformity over wider areas, 360° Complete with DC motor Speed control panel for variable rotation speeds in range 20RPM to 60RPM. Film thickness measurement: PN E08669000 Model: FTM7 quartz crystal film thickness deposition monitor Digital display of deposition rate and deposition thickness Information storage for 11 sputtering materials RS232 interface to enable data logging and programming from PC PN: E08667000 Quartz crystal sensor head with (5) spare crystals Power: 208 V, 60 Hz, 25 A 2006 vintage.