二手 EDWARDS E306 #19187 待售

Box chamber 4" Diffstak Manual valve 12" Bell jar chamber on modular base plate E2M8 backing pump Gauging LT circuitry EUR power input The fixing kit has the seal and the clamps for the interface System: with diffusion pumping system, Edwards RV8, (8m3/hr) dual stage rotary pump, bell jar chamber. The vacuum chamber is mounted on top of the Edwards base plate and an implosion guard aids safety. Vacuum control will be via a manual high vacuum valve actuated from the front face of the evaporator frame. An active strain cold cathode type vacuum gauge will report chamber vacuum levels, whilst a pirani gauge will report backing / roughing vacuum levels. Interlocks will be provided for vacuum and cabinet doors. Chamber: The chamber will be based on the standard Edwards 360mm high glass bell jar which has to be lifted from the base plate to allow for access to the sample / techniques. A glass cylinder and top plate chamber is optional. An implosion guard is fitted over the bell jar. Vacuum: Ultimate vacuum specification of the system will be 1 x 10-6 mbar without the addition of liquid nitrogen to the cryo panel Source shutter: One manual source shutter, (operated from a mechanical lever on the left side of the base plate collar). Control is via the SQM160. Process control: Inficon SQM-160 thin film monitor complete with download software suite (Windows based). Also included here is one crystal head(s) with oscillator and cable set(s), RS232 cable and PC software. The SQM160 will interface to the source shutter. TE4 thermal source: Four discrete crucible / filament resistive evaporator with manual crucible selection via the Edwards control unit. The source is water cooled (option) and the electrical feed through kit provides power to the device. The source has cross contamination shielding, 400A rated feed through and 100A rated connection cables. Source PSU is the existing Edwards E306 unit. Consumables: Qty 5 Tungsten basket Options: Glow discharge Thermal evaporation E-beam deposition Sample heating / cooling Thin film monitor Motorized shutters 8-Sample rotation stage and cylinder chamber upgrade Plasma Glo bar ARDK-8 sample rotation stage and cylinder chamber upgrade A glass cylinder and top plate chamber Turbo molecular pump conversion MiniBox front loading chamber upgrade MiniBox shielding MiniBox fixing kit Step up transformer 120vac/60hz/1p input, 300VA rated.