二手 USHIO UFX-2259B-AMB01 #9375525 待售
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ID: 9375525
優質的: 2009
Exposure system
Shutter unit:
Exposure area, P/N; 2317-3246
Mask light source
Optical parts:
Light collecting mirror, P/N: 2306-3208
Plane mirror, P/N: 2836-7583
Projection lens, P/N: UPL-59EX
Microscope, P/N: 1000051733 / 3185-0361
Workpiece stage:
Beam splitters, P/N: 1000049959 (43.5)
Beam splitter, P/N: 1000029070 (11.5)
Motor unit (X, Y, Θ), P/N: 3026-0870
Work stage units:
Drive shaft pressure wheel unit
Drive shaft unit
Brake shaft unit
Clamp unit
Vacuum suction plate
Anti-uplifting press wheel group
Illumination / Microscope: Light cover light source gate
Micrometer (Precision sliding table), P/N: MHS2-13
OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R)
Reel receiving and discharging mechanism:
AC Motor, P/N: VHR206AGVJ / GV2G250
AC Motor, P/N: 2TK3GN-AGN25K
Clutch, P/N: AMC-40
(6) Drive / Brake units:
MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A
MATSUSHITA Motor driver (Drive unit), P/N: MSD5A1P1EA
Clutch, P/N: AMC-5
Piping units:
SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41
SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F
SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27
SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B
PCB:
USHIO Auto micrometer, P/N: PB-1026B
USHIO Motor interface, P/N: PB-1017B
USHIO Motor interface, P/N: PB-1018B
USHIO Rotary encoder I / F, P/N: HC ENC I/F
USHIO Shutter control, P/N: PB-1040B
NDG Switcher, P/N: PB-1028B-U00
Video IN, P/N: RICE-001
Video OUT, P/N: PLUM-001
MELEC Motor control, P/N: C-864V1
Screen / Peripheral:
KEYENCE VT-7S Touch panel display
AU Positioning visual screen
Mouse for visual teaching
PLC:
MITSUBISHI CPU Unit, P/N: Q06HCPU
MITSUBISHI Serial data unit, P/N: QJ71C24-R2
MITSUBISHI 64-Point IN unit, P/N: QX40
MITSUBISHI 65-Point OUT unit, P/N: QY50
MITSUBISHI 2-Axis positioning unit, P/N: QD75D2
MITSUBISHI High speed counter, P/N: QD62D
MITSUBISHI Memory card, P/N: Q2MEM-8MBA
MITSUBISHI QJC1724N
MITSUBISHI QJ61BT11N
Internal wiring; Sensor line / Communication line
PC Host: AUPC
Air mount: (4) Balance air cushions
ULVAC DA-60S Vaccum pump
Static elimination: Ion gun
Air conditioner
2009 vintage.
USHIO UFX-2259B-AMB01是一種精密光學曝光設備，設計用於半導體和精密光學工業。它采用領先技術構建,為用戶提供可靠和高性能的曝光功能。曝光系統具有場發射電子槍組件，使其能夠產生極高分辨率和可重復曝光。場發射電子槍可以產生能量範圍為1-30kV的電子束，對暴露劑量水平提供極好的控制。這一特性確保了通過最小擴散和電子散射來實現精確曝光。UFX-2259B-AMB01還具有高精度晶圓掃描單元。掃描機由步進電機和步進驅動器組成，用於以可編程速度掃描晶圓。此功能可實現高速和高精度晶片掃描,從而實現精確的曝光模式控制。此外，該工具還配備了加熱氣體擴散室，確保了對氣體擴散的精確控制。氣體擴散資產確保晶圓上均勻的B因子，無論晶圓大小或暴露劑量變化如何。這一特性對於生產具有極小特性的高精度晶片尤為重要。還包括一個集成的真空提取模型，提供了最優晶片加載和卸載。提取設備用於抽取暴露系統留下的任何顆粒、汙染物或其他殘留物，確保晶片不受汙染。最後，USHIO UFX-2259B-AMB01單元配備了計算機控制的接觸曝光處理器。接觸曝光處理器使用戶能夠編程曝光參數並在曝光後檢查晶片。此功能有助於確保結果可重現且一致。總體而言，UFX-2259B-AMB01是一個強大和可靠的曝光機器，旨在提供最大程度的曝光精度和可重復性。其特點確保高分辨率和均勻的暴露，同時消除任何汙染風險。因此，它是半導體和精密光學應用的理想選擇。
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