二手 AMAT / APPLIED MATERIALS / VARIAN VIISta HCP+ #293827340 待售
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ID: 293827340
晶圓大小: 12"
優質的: 2007
High current ion implanter, 12"
(4) Load Ports
Linear Track
(6) BROOKS AUTOMATION Dual arm robots
DBM2706-V2 Robot controller
Signal tower (4 Lights)
Monitor
Keyboard
E/S module:
Platen
Roplat
E-Clamp PSU
6A51 IAN Computer
6A51 NCS Computer
6A26 HV PSU
6A37 Turbo PSU
Decel 2 PS control
6A50 Transport module control
6A49 TMC amplifier assembly
Dual Head OFG power supply
6A Pneumatic interface
On BOARD Cryo control
CTI IS Control
6A11 Process module control
6A14 PMC amplifier assembly
6A13 Dual PFG PS Control
6A16 PFG PSU
(4) 6A Analog / Digital I/O Interfaces
Trek 681B 6A Chuck PSU
Process module controller I/V
Facilities module:
7A4 Pneumatics interface
7A5 Main PD Interface
7A7 DI PS Control
GLASSMAN 7A8 HV PSU
SERIES 1000 7A9 HV PSU
Exhaust conductivity monitor control
7A15 Signal tower controller
MGE UPS systems UPS
Analyzer Magnet 90 deg module:
LAMBDA 2A1 Genesys DC PSU
LAMBDA / EMI 2A2 ESS PSU
2A3 Analog / Digital I/O Interface
2A 2 Axis motor control
2A5 Analog / Digital I/O Interface
2A Decel 1 Suppression PSU controller
2A 90 Magnet PS Control
2A8 Analog / Digital I/O Interface
2A Beamline pneumatics interface
2A Analyzer corrector magnet
2A PS Interface
2A Vacuum pump interface
EDWARDS SCU-1500 2A Turbo controller X2
2A Source magnet PSU
2A Source magnet PS control
2A Analog / Digital I/O Interface
2A Analog / Digital I/O Interface
2A Manipulator control
SERIES 1000 SRC Suppression power supply
Setup cup controller monitor
Filament power supply
Quad Magnet polarity switch
Decel -1 Focus power supply
Source suppression P.S controller
Analyzer magnet:
Rod controller
Rod controller PSU
Decel 2 Suppression PSU Control
Decel 2 Suppression PSU
Decel 2 Focus PSU
70 Magnet PS control
Analyzer corrector magnet PSU
X6 Analog / Digital I/O Interface
3A Multipole PSU
3A Rod controller down
Source: Head, Bushing, Electrode
Gas cab:
Gas modules:
Pos 1 HP Argon CGA 530 (MFC: 1600)
Pos 2 SDS BF3 1/4 VCR (MFC: 1662)
Pos 4 SDS GeF4 1/2 VCR (MFC: UFC-1663)
Pos 3 SDS AsH3 1/2 VCR (MFC: GF120XSL)
Gas cab control:
(3) UNIVERSAL 1A22 to 24 Analog/Digital I/O Interfaces
1A20 Source isolation controller
LAMBDA Programmable supply
TDK / LAMBDA Programmable supply
TDI Filament PSU
LAMBDA EMI ESS PSU
Gas box power distribution
Vacuum system:
Roughing pump
EBARA A10S Roughing pump beamline and source
EBARA A10S-B Roughing pump load lock
(2) CTI IS-1000 Cryo compressors
Others:
CVCF assembly
VESDA
Chiller
Transformer
2007 vintage.
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