二手 AMAT / APPLIED MATERIALS / VARIAN VIISta HCP+ #293827340 待售

ID: 293827340
晶圓大小: 12"
優質的: 2007
High current ion implanter, 12" (4) Load Ports Linear Track (6) BROOKS AUTOMATION Dual arm robots DBM2706-V2 Robot controller Signal tower (4 Lights) Monitor Keyboard E/S module: Platen Roplat E-Clamp PSU 6A51 IAN Computer 6A51 NCS Computer 6A26 HV PSU 6A37 Turbo PSU Decel 2 PS control 6A50 Transport module control 6A49 TMC amplifier assembly Dual Head OFG power supply 6A Pneumatic interface On BOARD Cryo control CTI IS Control 6A11 Process module control 6A14 PMC amplifier assembly 6A13 Dual PFG PS Control 6A16 PFG PSU (4) 6A Analog / Digital I/O Interfaces Trek 681B 6A Chuck PSU Process module controller I/V Facilities module: 7A4 Pneumatics interface 7A5 Main PD Interface 7A7 DI PS Control GLASSMAN 7A8 HV PSU SERIES 1000 7A9 HV PSU Exhaust conductivity monitor control 7A15 Signal tower controller MGE UPS systems UPS Analyzer Magnet 90 deg module: LAMBDA 2A1 Genesys DC PSU LAMBDA / EMI 2A2 ESS PSU 2A3 Analog / Digital I/O Interface 2A 2 Axis motor control 2A5 Analog / Digital I/O Interface 2A Decel 1 Suppression PSU controller 2A 90 Magnet PS Control 2A8 Analog / Digital I/O Interface 2A Beamline pneumatics interface 2A Analyzer corrector magnet 2A PS Interface 2A Vacuum pump interface EDWARDS SCU-1500 2A Turbo controller X2 2A Source magnet PSU 2A Source magnet PS control 2A Analog / Digital I/O Interface 2A Analog / Digital I/O Interface 2A Manipulator control SERIES 1000 SRC Suppression power supply Setup cup controller monitor Filament power supply Quad Magnet polarity switch Decel -1 Focus power supply Source suppression P.S controller Analyzer magnet: Rod controller Rod controller PSU Decel 2 Suppression PSU Control Decel 2 Suppression PSU Decel 2 Focus PSU 70 Magnet PS control Analyzer corrector magnet PSU X6 Analog / Digital I/O Interface 3A Multipole PSU 3A Rod controller down Source: Head, Bushing, Electrode Gas cab: Gas modules: Pos 1 HP Argon CGA 530 (MFC: 1600) Pos 2 SDS BF3 1/4 VCR (MFC: 1662) Pos 4 SDS GeF4 1/2 VCR (MFC: UFC-1663) Pos 3 SDS AsH3 1/2 VCR (MFC: GF120XSL) Gas cab control: (3) UNIVERSAL 1A22 to 24 Analog/Digital I/O Interfaces 1A20 Source isolation controller LAMBDA Programmable supply TDK / LAMBDA Programmable supply TDI Filament PSU LAMBDA EMI ESS PSU Gas box power distribution Vacuum system: Roughing pump EBARA A10S Roughing pump beamline and source EBARA A10S-B Roughing pump load lock (2) CTI IS-1000 Cryo compressors Others: CVCF assembly VESDA Chiller Transformer 2007 vintage.
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