二手 AMAT / APPLIED MATERIALS xR80 Leap II #9329404 待售
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ID: 9329404
晶圓大小: 8"
優質的: 2002
High current implanter, 8"
Processor module
Beamline module
Source services module
Processor rack
Mobile PC and desktop
Clean room PC
Signal tower
TEM Probe
ISO TX
Mains matching TX
Beamline controllers PSU's and assy:
Pre accel / Mag controller
Beamline Inst
Vacuum controller
Turbo controllers
Focus PSU
Decel PSU
A Mag PSU
Pre A converter PSU
Source mag PSU
Suppression PSU
Beam path components source / Extraction / Flight tube / MRS and PFS assy:
Source head type: IHC
Extraction type: Dual bellows
Flight tube
MRS
Pre-defining
PFS Type: HD
Control system: MOTOROLA 68040 Series
PC based operator interface
Gas cabinet:
SDS Module: AsH3 (SDS) / PH3 (SDS) / BF3 (SDS) / SDS
Purge Module
PSU's Controllers and assy:
Gas and temperature controller
Filament PSU
Arc PSU
Bias PSU
DPS
Pre A HV stack
G2 PSU, 8"
Source ISO TX
Vacuum system:
LEYBOLD 1000C Turbo pump
LEYBOLD 361C MRS Turbo pump
LEYBOLD Turbotronik NT20 Turbo pump controllers
EDWARDS iQDP40 Beamline dry pump
CTI-CRYOGENICS OB -10 Side cryo pump
CTI-CRYOGENICS OB -10 Rear cryo pump
CTI-CRYOGENICS 9600 Side cryo compressor, 220 V
CTI-CRYOGENICS 9600 Rear cryo compressor, 220 V
Processor PSU's controller and assy:
Wheel and components
Spin motor
Gripper
Transfer arm
Clip actuator
Blade
A/B Sensor
Tilt assy, 0-7°
PFS DP Box
Beam stop
Beam profiler
Filament PSU (PFS)
Wafer loader:
Carousel
Indexer
W/L Door
Oriented
Cassettes / Trays: (3) Trays
Arm servo PSU
Arm servo controller
Control Rack:
DAQ PDU
Option chassis
Target system installer
W/L Controller
W/L Vacuum
Ground PDU
Target system vacuum
Spin / Scan controller
Direct drive interface
Plasma flood chassis
Amp scanner
Amp spinner
Spin / Scan PDU
Bleed resistor
VME:
CPU Main board
Loop controller
Tetrode source head
80 keV Stack with resistors on top
G2 Power supply side of gas cabinet
G2 Resistor next to source head
Source transformer
ISO Transformer W/L area
Larger beam / Stop
Decal chassis under B/line
HD PFS
Operating system: Windows NT
2002 vintage.
AMAT/APPLIED MATERIALS xR80 Leap II是一種預制的離子植入器和監測器。這件設備是專門為植入和監測非常小的基材尺寸而設計的,例如半導體制造中使用的晶圓芯片。Leap II能夠進行高通量植入和實時監控。Leap II的主要特點是能夠與各種植入物氣體和摻雜物質一起操作。利用xR80平臺,Leap II能夠在低至-100 °C的溫度下精確植入。它具有高達800 keV的能量範圍,可以更好地控制植入過程。此外,Leap II還具有非常高效的機械冷卻設備,可實現更快的熱身和冷卻時間。這樣可以縮短周期時間和提高流程效率。The Leap II also features a high-resolution digital imaging system to perform inline substrate imaging to確保植入的精確度。該單元使用CCD相機捕獲基板的高分辨率數字圖像,允許精確的過程控制。這臺監控機器為流程優化提供實時反饋。Leap II有一個先進的晶圓監控工具,它結合了先進的機械、光學和電氣元件,在植入過程中提供各種參數的精確測量。此監視資產可以檢測潛在的錯誤並幫助防止其發生。Leap II獨特的xR80平臺也有集成的控制軟件,提供增強的過程跟蹤和控制。此軟件可實現更好的流程優化和流程跟蹤,並可針對特定流程或應用程序需求進行定制。除了高性能的waft分析和過程控制系統外,Leap II還為自動化安裝配備了高端機器人模型。這種機器人設備甚至可以用來執行最復雜的安裝,允許進一步的過程控制和提高效率。總體而言,AMAT xR80 Leap II是一種功能強大的預制離子植入器和監控器,可提供高效的植入和實時基板分析。其先進的控制軟件允許流程可追蹤性和集成機器人系統提供自動化安裝。這個單元是完美的半導體芯片制造商尋找高效和精確的植入。
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