二手 AMAT / APPLIED MATERIALS xR80 Leap II #9329404 待售

ID: 9329404
晶圓大小: 8"
優質的: 2002
High current implanter, 8" Processor module Beamline module Source services module Processor rack Mobile PC and desktop Clean room PC Signal tower TEM Probe ISO TX Mains matching TX Beamline controllers PSU's and assy: Pre accel / Mag controller Beamline Inst Vacuum controller Turbo controllers Focus PSU Decel PSU A Mag PSU Pre A converter PSU Source mag PSU Suppression PSU Beam path components source / Extraction / Flight tube / MRS and PFS assy: Source head type: IHC Extraction type: Dual bellows Flight tube MRS Pre-defining PFS Type: HD Control system: MOTOROLA 68040 Series PC based operator interface Gas cabinet: SDS Module: AsH3 (SDS) / PH3 (SDS) / BF3 (SDS) / SDS Purge Module PSU's Controllers and assy: Gas and temperature controller Filament PSU Arc PSU Bias PSU DPS Pre A HV stack G2 PSU, 8" Source ISO TX Vacuum system: LEYBOLD 1000C Turbo pump LEYBOLD 361C MRS Turbo pump LEYBOLD Turbotronik NT20 Turbo pump controllers EDWARDS iQDP40 Beamline dry pump CTI-CRYOGENICS OB -10 Side cryo pump CTI-CRYOGENICS OB -10 Rear cryo pump CTI-CRYOGENICS 9600 Side cryo compressor, 220 V CTI-CRYOGENICS 9600 Rear cryo compressor, 220 V Processor PSU's controller and assy: Wheel and components Spin motor Gripper Transfer arm Clip actuator Blade A/B Sensor Tilt assy, 0-7° PFS DP Box Beam stop Beam profiler Filament PSU (PFS) Wafer loader: Carousel Indexer W/L Door Oriented Cassettes / Trays: (3) Trays Arm servo PSU Arm servo controller Control Rack: DAQ PDU Option chassis Target system installer W/L Controller W/L Vacuum Ground PDU Target system vacuum Spin / Scan controller Direct drive interface Plasma flood chassis Amp scanner Amp spinner Spin / Scan PDU Bleed resistor VME: CPU Main board Loop controller Tetrode source head 80 keV Stack with resistors on top G2 Power supply side of gas cabinet G2 Resistor next to source head Source transformer ISO Transformer W/L area Larger beam / Stop Decal chassis under B/line HD PFS Operating system: Windows NT 2002 vintage.
AMAT/APPLIED MATERIALS xR80 Leap II是一種預制的離子植入器和監測器。這件設備是專門為植入和監測非常小的基材尺寸而設計的,例如半導體制造中使用的晶圓芯片。Leap II能夠進行高通量植入和實時監控。Leap II的主要特點是能夠與各種植入物氣體和摻雜物質一起操作。利用xR80平臺,Leap II能夠在低至-100 °C的溫度下精確植入。它具有高達800 keV的能量範圍,可以更好地控制植入過程。此外,Leap II還具有非常高效的機械冷卻設備,可實現更快的熱身和冷卻時間。這樣可以縮短周期時間和提高流程效率。The Leap II also features a high-resolution digital imaging system to perform inline substrate imaging to確保植入的精確度。該單元使用CCD相機捕獲基板的高分辨率數字圖像,允許精確的過程控制。這臺監控機器為流程優化提供實時反饋。Leap II有一個先進的晶圓監控工具,它結合了先進的機械、光學和電氣元件,在植入過程中提供各種參數的精確測量。此監視資產可以檢測潛在的錯誤並幫助防止其發生。Leap II獨特的xR80平臺也有集成的控制軟件,提供增強的過程跟蹤和控制。此軟件可實現更好的流程優化和流程跟蹤,並可針對特定流程或應用程序需求進行定制。除了高性能的waft分析和過程控制系統外,Leap II還為自動化安裝配備了高端機器人模型。這種機器人設備甚至可以用來執行最復雜的安裝,允許進一步的過程控制和提高效率。總體而言,AMAT xR80 Leap II是一種功能強大的預制離子植入器和監控器,可提供高效的植入和實時基板分析。其先進的控制軟件允許流程可追蹤性和集成機器人系統提供自動化安裝。這個單元是完美的半導體芯片制造商尋找高效和精確的植入。
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