二手 EATON NOVA / AXCELIS GSD 200 #9173588 待售

Ion implanter, 6" Energy 80kv or 160kv: 180 kV 15 ma system Control system: Sun workstation type: SPARC 5 Cell controller CPU PCB type: VME 177 Monitor size and type: LCD Transformer: Oil Device interface: Ground electronic Dl rack: Yes, 1163960 Disk vac DI rack: Yes Terminal beatline Dl rack: Yes, 1163962 Gas control rack: Yes Source control DI rack: Yes Dose control DI rack: Yes Terminal electronic Dl rack: Yes Main tower distribution DI rack: Yes Terminal power distribution Dl rack: Yes Ground power distribution DI rack: Yes Disk thermal couple Dl rack: Yes, 1187280 Loadlock control DI rack: Yes, 1176551 Gas box: Source cabinet: Yes Gas lines (3 or 4 line): Non module Gas type: HP or SDS Line 1 HP (Ar) 1510A Line 2 SDS (BF3) 8162 Line 3 HP (AsH3) 1501A Line 4 SDS (PH3) 8162 Source / Terminal: Source head type or P/N: Bernus Extraction electrode type or P/N: 1153600, Old type Extraction power supply P/N: OL8000HV unit 100W Source rough pump type: No Source Hi-Vac pump type: Diffusion pump Beam guide P/N: Yes, Old type P8 Turbo pump type: No Dual vaporizer: No Filament power supply: Yes Vaporizer power supply: Yes Arc power supply: Yes Source suppression power supply: Yes Analyzer magnet power supply: Yes Source magnet power supply: Yes Quadruple power supply: No Quadrapole assy: No Resolving / Endstation: Post accel suppression power supply: Yes, -5 kV,100mA Post accel high voltage power type: OL8000/104/05 Post accel electrode assy: Yes, 1165340 Post accel tube assy: Yes Electron shower: Yes, E-show / Old type Shower power supply P/N: Yes, 1168391 Electron shower gas bleed assy: No Whole enclosure door: Yes Wafer transfer controller type P/N: Old type-ASYNC Robot controller type or P/N: Old type-ASYNC Loadlock controller type or P/N: Yes, 1176551 Rotary controller type or P/N: 1169071, Belt type Y-Scan controller type or P/N: Yes, 1169081 Gyro controller type or P/N: Old type-ASYNC, 1168391 Cryo pump P2 / On board: CTI Torr 8 Cryo pump P3 / On board: CTI Torr 10 Cryo pump compressor type: 8200 9600 Disk chiller type: Yes, HX-150 RP2 for P2 / P3 / Beamline / Process / Loadlock: No RP3 for sliding seal: No P9 Cryo pump / Compressor: No Wafer buffer: No Belt type Current: (2) HP (2) SDS Disk size: 6" (old type) 1173936 Manual / Drawing: No Power requirements: 208 V, 50/60 Hz, 3-phase, 50 kVA Currently de-installed and warehoused 1992 vintage.