二手 EATON NOVA / AXCELIS GSD 200E #9209411 待售

Implanter, 8" Upgrade kit from 80 KeV to 160 KeV Parts included: P/N / Description 2200109 / Hvps dual output -5kv glassman (mnl 8101410) - / Red housing, nv-gsd-200e, rated for 160 kv operation 1204990 / Arc power supply mod nv20a 1204990 / Arc power supply mod nv20a 1204990 / Arc power supply mod nv20a 1199240 / Dis 58900 fld rpl only disk faraday assy gsd-200 17335010 / (2) Ground electrodes 17021871 / (2) Aperture vgi electron showers 3100353 / Pump turbo tmp 1000c 250 1so-k/kf40 3100353 / Pump turbo tmp 1000c 250 1so-k/kf40 - / Module controller turbo pump scu-1000c 2200114 / Hvps – 5kv 20 ma del elect 1190160 / Plasma shower gun assembly 17121720 / Graphite shield e-shower 17335030 / Ground electrode 1141471 / Faraday flag assy vitreous graphite 1181490 / Sce rgh valve v8 3500087 / O-ring -216 buna 17C5290 / Mo knob bolt 17C2983 / Set screw molybdenium 17D6405 / Cathode electrode 1766531 / Plt burn thru (vt1) 17E9560 / Feed through bracket 17E9561 / Bracket 3500496 / O-ring -208 viton 5000132 / Stdf 3/8lx3/8x6-32 rnd cer hhs 17121850 / Repeller insulator 17304680 / Shower tube aperture ii pef-xe gsdiii/led 17067300 / Cover terminal 17100170 / Corona ring 1710831 / Cover, terminal box 17071160 / Cover, terminal plate 17067720 / Cover plate, (3) screws 17081180 / Cover 17068520 / (2) Brackets, angled 17071130 / Cover, red box 17071140 / Cover, red box 17074820 / (2) Covers, flexs 17022381 / (5) Shim insul 1/16 terms nv20 17072382 / (2) Shim insul 1/32 terms nv20 E17022380 / (2) Shim insulator terminals 4001587 / (2) Knob four arms clamping 5/16-18 unc 1199850 / Terminal exh kit 17051500 / Rp1 exhaust kit 1185620 / Terminal exh kit 1837180 / Alignment tools els 1833870 / Alignment tools els 17244920 / (3) Cover lower plasmas 17249760 / (2) Cover upper plasma showers - / Scu-1000c turbo pump controller 17D1284 / (2) Nozzle retainers 11032780 / (3) Assy src housing sprt flag shields 11b3641 17150050 / Supp rack 17063520 / (2) Supp racks 17095870 / (2) Supp racks 17120370 / Supp rack 17091650 / (3) Supp racks TUBE / (4) Supp racks 17103190A / Fil power dist 1168893 / Electron shower iv power supply 1168200 / Source di controller 1168201 / Source di controller 17080520-A / Lead shield 1169724 / Air distr. manifold 1184260 / Filter box 17127550 / Source alignment tool 1190500 / Electromagnetic reflector assy 1745100 / Source magnet assembly 17099070 / Cover 17095340-C / Feedthrough manifold 17324630 / (2) Insulator manipulator leds 1181831 / Faraday flag assy vit gr - / Various blank-offs plates 1181831 / Faraday flag assy vit gr 17E3662 / Front slit (w) 17S2467 / Disk 17128680 / Block RP1 EXH / RP1 Exhaust kit - / Accel suppression electrode - / (3) Various graphites - / Various graphite - / Source main alignment fixture - / Vra cylinder, led ultra - / Edwards valve - / Edwards cable 300302720 / Ckd valve - / Edwards vacuum gauge - / Cooling block - / Chamber end plate 17092060A / Roof panel, 67 cm x 87 cm x 1.5 cm 17092040C / Roof panel with exhaust cutout 17092020B / Roof panel with small exhaust cutout 17092030B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm 17092050A / Roof panel, 120.5 cm x 67 cm x1.5 cm 17092070B / Roof panel with exhaust cutout, 120.5 cm x 67cm x 1.5 cm 17092505B / Angled roof panel with exhaust cutout, 50x28, 183x120 17092XXXX / Angled roof panel with square cutout 1707075XX / Door panel, l front 175.5 cm x 97 cm x 2.7 cm 170707XXX / Door panel, l rear 175.5 cm x 97 cm x 2.7 cm 17065501G / Door panel, 175.5 x 97 x 2.5 170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm 170X2540B / Door panel, 175.5 cm x 81 cm x 2.7 cm 17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm 170XXXXX / Angled roof panel, 36.5 + 56 + 19 x 184 + 179.5 + 128.5 26.8 cm 170XXXXX / Angled roof panel, 50+28 183 (120) 17079780C / Extraction electrode shield, 62.5 cm 35 + 8 cm 17092600-D / Implant internal shield, 45.5 x 75.7 x 04 170XXXXX / Lead shield, 63.3 cm x 198 cm x 0.5 cm 1709XXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm 17065480C / Terminal corner beam, 196.6 cm x 7.5 + 4.7 cm 170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm 170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm 170XXXXX / Terminal corner beam, 196.6 cm x 7.5 + 2.5 cm 170XXXXX / Door panel, 175.5 cm x 81 cm x 2.7 cm 170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm 17092540 / Door panel, 175.5 cm x 81 cm x 2.7 cm 170XXXXX / Door panel, 175.5 cm x 97 cm x 2.7 cm 17065501G / Door panel, 175.5 cm x 97 cm x 2.7 cm 1179030D / Back of terminal, 194.5 cm x 223 cm 1XXXXXXX / Front of terminal, 223 cm x 194.5 cm 1XXXXXXX / Front panel, 134 cm x 110.5 cm 170XXXXX / Earth rod 17075120X / Earth rod 1995 vintage.