二手 SEN / SUMITOMO EATON NOVA NV-GSD-HE3 #9283245 待售

High energy implanter, 12" (4) FOUP Energy Range: 10 KeV to 3750 KeV with RTEM (Real Time Energy Monitoring Capability) UPS: MUF3051-BL Mass analysis magnet and power supply Inject flag faraday Power supply: 3 kW, 13.56 MHz Does not include Hard Disk Drive (HDD) LIner Accelerator: (12) High energy resonator cavities (14) Quadrupole Quadrupole Lens and power supply Final energy magnet and power supply Resolving faraday Continuous variable aperature IBM work station End station wafer handling: In-air/In-vacuum high throughput wafer handling system ULPA filtered wafer handling area Automatic notch alignment capability with buffer cassette Integrated dummy wafer fill-in capability Slot to slot wafer integrity End station disk: Two axis variable implant angle (13) Wafers process disk with direct, 12" End station dose control: Real time patented dose control End station robot: SEN MACOROB 300 End station options: Valved RGA port on end station resolving Valved RGA port on disk module Faraday burn through sense Facilities utilities: Feed from bottom Feed gas box exhaust from top Facilities cables: Remote cryo pump compressor cable Rremote disk chiller cable High voltage beacon Main PD assembly Signal tower light assy (4) Light CE Fire safety kit smoke detector VESDA 60 Hz Standard Gas box exhaust needs to feed from top High Voltage Warning Display - English Gas box: Gas 1 type Gas box gas type position Ar with HP Gas 2 type Gas box gas type position BF3 with SDS Gas 3 type Gas box gas type position BF3 with SDS Gas 4 type Gas box gas type position PH3 with SDS Gas 5 type Gas box gas type position PH3 with SDS MFC2 Unit 8160 10 ccm MFC3 Unit 8162 5 ccm MFC4 Unit 8162 10 ccm MFC5 Unit 8162 10 ccm Remote rack: SEN chiller Heater exchange from FAC Service PC X-terminal Door Bypass Switch: Source head: ELS 3-AXIS Extraction electrode: Vacuum Cryopump CP2 BROOKS OB-8 Vacuum Cryopump CP3 BROOKS OB-10 Vacuum Cryopump CP7 BROOKS OB-250F Vacuum Cryopump CP8 BROOKS OB-250F Vacuum STP-2203C TP1 Vacuum STP-A803C TP4 Vacuum STP-A1303C TP5 Vacuum STP-A803C TP10 Vacuum STP-A1303C TP11 Vacuum STP-A803C TP12 Manual included.