二手 VARIAN E220HP #9222331 待售

Medium current ion implanter, 6" (2) Stage EBARA dry pumps EBARA E/S Rough dry pump EBARA Source roughing dry pump Compressor: CTI-8500 / SUZUKI C300 He line: 15M Target cryo: CT-8F Load lock pump: SUZUKI Baby Cryo Source Pump: SEIKO SEIKI Turbo pump Aperture pump: SEIKO SEIKI Turbo pump Scanner pump: SEIKO SEIKI Turbo pump Vacuum system Gauge: CCIG Cooling system: Ground & terminal water pump Power system: UPS Wafer handler system Hand off type: Standard Handler motor Platen (Mechanical) Roplat head Roplat cable Tilter assy P/N Linear motor servo controller Platen tilter servo controller Rotating platen / Scanfara controller Ropins motor Scan field forcer Heat exchange Orienter motor (Belt type) Orienter sensor (Lamp) Orienter controller Orienter lifter controller Right elevator controller Left elevator controller Mapping sensor Cassette / Tilt sensor Service monitor Gas supply system: Gas bottle type: High pressure (3) Gas bottle Gas box type: HP Beam generation / Source: Ion source: E11030996 Bernas Arc PS Filament PS Extraction PS: 40 kV Extraction suppression PS AMU Power supply Lens power supply E220 Source bushing 2 Step reducer Beam generation / Beam-line Trek amplifier: 20 KV Acceleration PS: 180 KV Acceleration suppression PS Acceleration column Mirror PS Decel PS PCB Scan generator Scan generator controller Beam measurement & scan check: Uniformity controller Dose integrator control Beam purity check Faraday No Accel / Decel switch hardware Quality kit: E220 Energy probe Automation: Host.