二手 VARIAN Viista 810 #9012362 待售

Medium current ion implanter 8" and 12" bridge capable Software version: 7.1 Power distribution: 60 Hz End station: Single wafer processing Integral orientation control ±60° 2-axis Programmable in 1° steps Accuracy: ±0.5° Orientation: 0 to 360° at ±1° accuracy Rotation: equivalent multi-tilt Quad mode No buffer station No FOUP or small WIP buffer Cryopumps: CTI 250F, (chamber), P1, P2, P3, no P5 Cryopumps 2: CTI 250F, (beamline), P4 Cryopumps 3: CTI 250F, (corrector magnet), no P6 Venturi pump for air-bearing differential seals, stage 3: Vaccubrand MZ 2T Diaphragm Roughing pump: Edwards XDS35i Roughing pump 2: Alcatel ADP 122P Roughing pump 3: Alcatel ADP 122L TMP: (1) Pfeiffer TMH-261, (1) Varian V300HT turbo molecular pump for end station load locks TMP 2: Pfeiffer TMH 521 for the source (P1) TMP 3: Pfeiffer TMH 521 pump for the beamline Pump remote kit: 15 m cable length (for cryo-compressors, dry pumps and DI water system) Gasbox 1: Ar HP UNIT 1660 Gasbox 2: BF3 HP UNIT 1660 Gasbox 3: AsH3 SDS UNIT 1662 Gasbox 4: Ph3 SDS UNIT 1662 Gasbox 5: none Gasbox 6: none Gas card configuration: Machine: IMMC1C3000 Bottle 1: SDS As Size: 10X Bottle 2: SDS Phos Size: 10X Bottle 3: BF3 Size: 10X Bottle 4: Ar Size: 10X Bottle 5: Xenon Size: 7X Gas / DISS/CGA / Torque / Head Size / Head Stamp Argon / diss 718 / 12 lbs / 1 3/8 in / non Sds phos / .5 in vcr / 35 lbs / 1 in / sds Hp phos / diss 632 / 35 lbs / 1 1/4 in / tox Sds arsine / .5 in vcr / 35 lbs / 1 in / sds Hp arsine / diss 718 / 35 lbs / 1 1/4 in / tox Bf3 / diss 642 / 12 lbs / 1 1/4 in / tox Enriched boron / cga 330 / 25 lbs / 1 1/8 in / ben Xenon / cga 180 / 12 lbs / 3/4 in / xen Co2 / cga 180 / 12 lbs / 3/4 in / xen Xenon / cga 580 / 47 lbs / 1 1/4 in / xen.