二手 VEECO RF 350S #293724392 待售
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ID: 293724392
晶圓大小: 8"
Ion beam system, 8"
BROOKS AUTOMATION 003-9010-03 Indexer
BROOKS AUTOMATION 001-2980-64 Aligner
BROOKS AUTOMATION 001-7500-02 Robot
LEYBOLD HERAEUS TMP260U
LEYBOLD TURBO PUMP TMP260SG
LAYBOLD TURBO PUMP TMP361C
ION Beam etch
PFEIFFER BALZERS TPH2200U Turbo pump
(1) Chamber
NESLAB HX-150 Chiller
Operating system: Windows 2000
Gas box:
Ar, 50 SCCM
O2, 50 SCCM.
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