二手 ESI 9830 #9190610 待售
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已售出
ID: 9190610
Laser repair systems
System mainframe:
Self contained environment
Temperature control
Vibration isolation
Field configurable for international power
ESD Resistant up to an 8KV discharge
X-Y Stage:
< 0.18 um |m| +3s accuracy over 35mm x 35mm field
Continuous and real-time accuracy calibration
Air bearing X-Y stage
Wide field of travel accommodates up to 300mm wafers
On the fly link blow capability
Vacuum wafer hold-down for 200mm or 300mm wafers
Laser subsystem:
Q-switched diode pumped vanadate laser
1.34 Microns (Infrared) wavelength
Air cooled
Fully programmable spot size range
Wafer handler subsystem:
Dual-yaw
3-Link
Fixed position robot with integral prealigner
Interchangeable load ports
Deionizer
ESI Vision subsystem:
Automatic wafer alignment using pattern recognition
Automatic recovery routines
Realtime optimization of operating parameters
ESI Scribe read / Scribe view
Front side alpha numeric / Bar code character recognition
System control computer subsystem:
Pentium VME single board computer:
Main memory: 1GB
High performance cache memory: 512KB
30GB SCSI HDD
DAT Tape
20GB Uncompressed / 40GB Compressed
DVD / CD Rom drive
Floppy disk drive, 3.5"
Arm-mounted 21" flat panel
Touchscreen color monitor
Industry standard ethernet interface connector
Operating system: Linux
Y2K Compatible
SEMI Compliant graphical user interface
TCP-IP
FTP, NFS
System control software:
Event logging capability
Variable MDA (Multiple die alignment) capability
Process monitoring capability
Robust wafer alignment capability
Graphical user interface
Pattern series generator
Algorithm verification tools
Documentation:
Standard system documentation
Service / Hardware support guide
Applications / Software support guide
On CD-Rom in PDF format
System mainframe configuration:
Maximum laser energy: 2uJ
Kit, 9830 destination, english
16.5±2ns @ 50kHz (LPW) Pulse picked
f0.55 Objective lens (Spot Size (1/e2): 1.6um - 3.8um)
System options:
Link inspection station
Backside WID kit
Exhaust duct option
Battery backup (UPS)
5-Light LED beacon assy
Seismic restraint brackets
Includes:
Advantag TAG read
Wafer mapper
Load port:
First load port: SEMI E15.1 load ports for 300mm foup
Second load port: 200mm and 300mm open cassettes
Load port options:
E84 Sensor DMS-HB1
Currently warehoused.
ESI 9830是一種高性能二極管泵浦固態激光設備。它采用四種不同的激光技術:脈沖激光二極管微芯片技術、光泵半導體激光技術、密封Nd: YAG激光技術和垂直外腔表面發射激光技術。從本質上講,這四種技術允許激光用於廣泛的醫療和工業應用。9830是一個長期可靠的激光系統,能夠執行各種程序。它采用810-980 nm的波長範圍,具有小於4納秒的脈沖寬度。它還能夠以高重復率和高達100mJ的脈沖能量運行。此外,它的印象區域最大可達30 x 30 mm,可用於各種不同的場景。在安全方面,ESI 9830有幾項功能,設計用於在操作激光時保護人員免受傷害。這包括第4類激光安全,這意味著激光有內置的發射屏障和一個掃描單元,以確保激光機器不會對該地區的操作員造成任何傷害。該設備還具有高功率、低成本的掃描儀部分,可提高患者在激光治療期間的安全性。9830具有卓越的性價比,成為一系列醫療和工業應用的熱門選擇。它以較低的運行成本提供了極好的長期投資,並有可能大幅降低長期治療的成本。其廣泛的功能(如自動優化模式交換)為用戶提供了跨不同條件的可靠、一致的性能。總體而言,ESI 9830是一款高性能的長期激光工具,具有令人印象深刻的一系列功能。適用於各種程序和申請,並提供卓越的性價比和安全保障。簡而言之,它為尋求高性能能源解決方案的用戶提供了可靠、用戶友好的解決方案。
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