二手 ESI 9830 #9229121 待售

Laser processing system Type: Diode-pumped wavelength laser: 1.34 μm With acousto-optic q-switch Air cooled power supply Pump source lifetime: >10,000 Hours Energy control: Up to a maximum of 2.0 μJ per pulse Focusing maintains: >95% Density at focus Laser pulse width: Options: 10 + 2 ns 15 + 2 ns Programmable spot size: Programmable range: 1.6 μm to 3.8 μm (1/e2) Programmable resolution: 0.1 μm Accuracy: 0.18 μm Plus 3 sigma over: 35 x 35 mm field Wafer handling: Thickness: 775 μm + 25 μm Optional wafer sensing: Double slotted Cross slotted Protruding wafer FOUP Load ports Load port: (2) SEMI E15.1 Load ports FOUP, 8"-12" Open cassettes and Open FOSB Link inspection system: High resolution: <0.5 μm, (1200x to 4400x zoom) Operating system: Linux User interface: SEMI Compliant touchscreen Networking: Ethernet 10/100 base-T With FTP and NSF protocols Wafer ID reading and illumination option Front and backside SEMI OCRA OCRB Canon character fonts With checksum Single character error correction routines Bar bode reading capability ESD Tolerance with stand-up to 8 kV Temperature control: Air handler maintains process environment temperature: + 0.10°C Wavelength: 1.34 μm Maximum laser rep rate: 30,000 Hz SEMI S2-0200 SEMI S8-0999 SEMI F47 CE Marked 2004 vintage.