二手 GSI LUMONICS SigmaClean #9279469 待售

Laser marking system, 5"-8" Laser flow cell Laser diodes Robot and aligner Mark point exhaust option Sigma 100 Acousto-optic Q-switched YLF Diode-pumped laser Internal water cooled laser Closed-loop power stabilization for consistent laser power output Dot matrix super softMark Fonts: SEMI OCR, BC412, and dot matrix formats (3) Cassettes load stations Cassette to Cassette operation Digital sigma clean operator and maintenance manuals SECS II/GEM Interface Interactive operator workstation With monitor and keyboard for marking control Display of system status and fault conditions Fonts: SEMI OCR, BC412, and other dot matrix formats Optical alignment over entire wafer size range With no hardware conversion Flat field focusing lens Throughput: Up to 240 Wph BROOKS / PRI/EQUIPE ATM105-2 Robot BROOKS / PRI/EQUIPE PRE-200 Aligner Dot diameter: Debris free Dot roundness: 78 µm ± 10 µm Dot depth: Major minor axis ratio less than 1.1 Throughput: 2.6 µm ± 0.4 µm Single pulse, 5 x 9 (10 x 18) dot matrix, 18 characters: 240 wafers / hour Process particle density mean: 170 wafers / hour Minimum character size for debris: <0.02 per cm² with mark contained Cylindrical band: 5 mm 1.1 mm high x 0.55 mm wide 2.2 mm high x 1.1 mm wide Single density: 5 x 9 Double density: 10 x 18 2.2 mm high x 1.1 mm width Dot diameter: Debris free Dot roundness: 78 µm ± 10 µm Dot depth: Major minor axis ratio less than 1.2 Throughput: 5.5 µm ± 0.7 µm Single pulse, 5 x 9 (10 x 18) dot matrix, 18 characters: 170 wafers / hour Process particle density mean: 130 wafers / hour Minimum character size for debris: <0.02 per cm² with mark contained Cylindrical band: 5 mm 1.1 mm high x 0.55 mm wide 2.2 mm high x 1.1 mm wide Single density: 5 x 9 Double density: 10 x 18 2.2 mm high x 1.1 mm width Power supply: 220 V, 50/60 Hz, Single phase Vacuum: 63.5-76.2 (25-30") Hg at (2) SCFM Exhaust: 52 mm (2") diameter port.