二手 ELS TECHNOLOGY ELS 106SA #9161431 待售

Mask aligner, 2"-4" Sapphire wafers Mask holder: Mask size: 1.4 inch × 4 inch : 101.2mm × 101.2mm Thickness: 1.6mm ± 0.2mm Mask size: 2.5 inch × 5 inch : 126.6mm × 126.6mm Thickness: 2.3mm ± 0.2mm Method: Pre-alignment: Stopper pin Mask fixture: By vacuum Substrate size: Φ2 inch sapphire wafer Diameter: 50.8mm ± 0.2mm. Thickness: 430um ± 25um Substrate size: Φ2.5 inch sapphire wafer Diameter: 61.75mm ± 0.2mm Thickness: 430um ± 25um Substrate size: Φ4 inch sapphire wafer Diameter: 100mm ± 0.5mm Thickness: 500um ~ 1000um ± 25um Material: Aluminum Method: Loading / Unloading: By manual Pre-alignment: Stopper pin Substrate fixture: By vacuum Stroke: Item Driver Range Resolution X axis Manual ±5mm 1um Y axis Manual ±5mm 1um Z axis AC Servo motor 0~1000um 1um θ axis Manual ±5° 0.0001° Parallelism compensation: Uniball mechanism Contact pressure: 0~0.17N/ cm2 Alignment accuracy: ±1um Lamp house: Lamp: 500W Hg Arc lamp Lamp is easy replace Exposure area: 150mm × 150mm Main wavelength: Item Wavelength Light intensity Uniformity i line 365nm >28mW/cm2 Within ±3% h line 405nm >40mW/cm2 Within ±3% g line 436nm >40mW/cm2 Within ±3% Exposure function, 4" Print resolution: Item Wavelength Printing resolution Adjustment Software contact 365nm 2um Hard contact 365nm 1um Vacuum contact 365nm 0.8um Proximity 365nm >3um 0~1000um Resist: AZ-5214E Thickness: 1um Utility: Voltage: 3ψ4W 220VAC 50/60 Hz, 5KVA Dry air: 6Kg/cm2 , 200L/min, Φ10mm N2: 6Kg/cm2, 100L/min, Φ10mm Vacuum: -1~0.8Kg/cm2, 200L/min, Φ10mm Outline: Substrate size: Φ2 inch sapphire wafer Diameter: 50.8mm ± 0.2mm Thickness: 430um ± 25um Substrate size: Φ2.5 inch sapphire wafer Diameter: 61.75mm ± 0.2mm Thickness: 430um ± 25um Substrate size: Φ4 inch sapphire wafer Diameter: 100mm ± 0.5mm Thickness: 500um ~ 1000um ± 25um Mask size: 1. 4 inch × 4 inch : 101.2mm × 101.2mm Thickness: 1.6mm ± 0.2mm Mask size: 2.5 inch × 5 inch : 126.6mm × 126.6mm Thickness: 2.3mm ± 0.2mm Application: ULD Stage Leveling unit Mask holder Alignment unit Exposure Alignment accuracy and auto leveling: ±1um AC Servo motor with pressure sensor for Z axis driving Alignment with CCD modules Easy to operate 2008-2010 vintages.