二手 HTG 84-3 #9198923 待售

UV Mask aligner With microscope UV Lamp power supply High resolution Sub-micron printing Contact and proximity exposures Scale production alignment capability Silicon, GaAs, LiNb, InP Consistent printing: Wafers Rectangular substrates Odd sized / Brittle materials Single or split field viewing Up to 600x magnification on the optics Alignment accuracy: ±1 µm Precise wafer to mask leveling Highly collimated UV/deep UV exposure systems Two channel intensity controlling power supply systems Stationary alignment tooling Vibration isolation console Differential micrometers Self planarizing chucks Wafer chuck and mask holder included Wafer chuck motions: X, Y, Z and ø (direct drive) Z-Axis adjustment: ±750µ Air-bearing planarization system Wafer / Substrate size: Up to 6.0" wafers / Square substrates Mask rotation: 180° Mask size: 7.0" x 7.0" Vacuum mask clamp Pneumatic mask assembly lift Front side alignment accuracy: <0.5µ Printing resolution: Near UV: <0.8µ Mid UV: <0.4µ Deep UV: <0.3µ Control functions: Power Test Substrate vacuum Mask vacuum Contact vacuum Expose Cycle Skip Mask lift N2 Purge Timer: 000.1 to 999.9 sec 0.1 increments Gauges: System vacuum Contact vacuum N2 1986 vintage.