二手 AMAT / APPLIED MATERIALS SemVision G2 Plus #9280524 待售

Defect review system, 12" Wafer handling: Loader: AMAT ADO with RFID ETU, 12" ITU, 12" FFU with ULPA Filter SEM Column G2 EDX Column Column tilts: 45 Deg Wafer rotation option Stage wafer holder: 3 PIN Aligner optical microscope 5x, 20x, 100x Pal (On the OTW, cassette / Slot 1: Delta X= 500 μm, Delta Y= 500 μm ITU Repeatability: Delta X and Delta Y < 20 μm Stage accuracy: Delta X and Delta Y < 1.5 μm MTR: Delta X: 50 Delta Y: 30 μm Resolution at 1 KeV: 3 nm Focus map / focus offset: 90% defect with Delta Z < 3 μms Automatic defect offset / XY Map: 95% defects with Delta X < 1.5 μm and Delta Y < 1.5 μm EDX resolution: 4 nm Wafer throughput: 12 Wafers / Hours Defects throughput >1000 Defects / Hour Cleanliness front side: 0.013 PWP / cm² > size at 0.2 μm Largest load ampere rating: 8 A Full load current: 10 A Interrupt current: 10,000 Amps Power requirements: 1-120 VAC, Single Phase, 3 Wire 208 V, 3 Phase, 5 Wire, 50/60 Hz 2002 vintage.