二手 MICROMETRIC IMS88M-AL #9256098 待售

Optical CD and overlay measurement system, 6" Measurement process: Automatic from cassette to cassette Does not include flat pre-aligner 3 Axis: Motorized X, Y and Z Robot autoloader and pre-aligner Auto focus Auto illumination Pattern recognition and vision-based measurements Measurement specifications: Overlay patterns Box-in-box Multi-bar patterns L-Patterns Overlay measurement accuracy (TIS): <0.010 um Overlay measurement repeatability (3σ): <0.010 um Line width measurement accuracy: 0.010 Micron Line width measurement repeatability (3σ): 0.006 Micron Motorized X,Y positioning stage X,Y Stage travel: 8" x 8" X,Y Stage velocity: 200 mm/sec X,Y Positioning accuracy (Per axis): 2.0 microns over full travel X,Y-Positioning resolution: 0.01 micron Z Stage travel: 0.1" (2.5 mm) Z-Positioning resolution: 0.01 micron Robotic wafer loader and pre-aligner: 4"-8" Wafers Dual cassettes Loader / Unloader Industrial rack-mounted computer CPU Pentium IV 2.4 GHz Hard Disk Drive (HDD): 100 GB CD-ROM Drive Ethernet communication VGA Display Keyboard and mouse Operating system: Windows 2000 Computer vision system CCD Camera Frame grabber board Microscope optical system: High precision line width measurement Vertical illuminator Parfocal objectives: 10x BF and 100x BF Monocular photo-tube with CCTV adapter Computer controlled Illumination system With 125 quartz-halogen lamp and fiber bundle Glass-scale linear encoders Resolution: 0.01 micron Point-to-point measurements: Edge detection Intersections Center lines Circle centers and centroids Option: X-Y Grid plate calibration 7" x 7" With 140 mm x 140 mm grid Temperature controlled chamber Temperature controlled range: ±0.25°C 2005 vintage.