ID: 293758216
晶圓大小: 8"-12"
Defect inspection system, 8"-12"
(2) BROOKS Vision load ports
YASKAWA XU-RC400M-D03 Robot
YASKAWA ERCR-NS01-B004 Robot controller
YASKAWA XU ACP130-B11 Wafer aligner
YASKAWA JZRCR-NPP02-01 Robot teaching box
Does not include wafer blade.
