二手 ZEISS / ACCRETECH / TSK RONCOM 55A #9118660 待售

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ID: 9118660
優質的: 2002
Form tester Measuring range: Max. measuring diameter: 350mm Left/right feed (R-axis): 191mm Up/down feed (Z-axis): 350mm Max. load diameter: 600mm Max. measuring height: outer diameter 350mm (675mm for roundness/coaxiality measurement), inner diameter 350mm Rotation accuracy: JIS B7451: (0.02 + 6H/10000)um H: height from table surface to measuring point (mm) Max. deviation from min. square circle: (0.01 + 3H/10000)um Straightness accuracy: Up/down direction (Z-axis): 0.15um/100mm, 0.3um/350mm Radius direction (R-axis): 1um/100mm Parallelness accuracy: Up/down direction (Z-axis): 1.5um/350mm Rotation speed: Measurement: 2-10/min Alignment: 6, 10 or 20/min Up/down speed (Z-axis): Measuring speed: 0.6-6.0mm Movement speed: 0.6-30.0mm Radius speed (R-axis) Measuring speed: 0.6-6.0mm Movement speed: 0.6-15mm Auto stop: Function: Z-axis, R-axis Stop accuracy: Z-axis +/-5um, R-axis +/-5um Table load conditions: Table outer diameter: 290mm Centering adjustment range: +/-5mm (automatic) Tiling adjustment range: +/-1° (automatic) Detector: Measuring force: 30-100mN Stylus shape: 1.6mm carbide ball Roundness evaluation of profile error: MZC (min. range center line method), LSC (min. square center line method), MIC (max. inscribed circle center line method) MCC (min. circumscribed circle center line), N.C. (no correction) Measuring items: Rotation direction: roundness, flatness, parallelness, concentricity, coaxiality, cylindricity, diameter deviation, non-uniformity, squareness, run-out Rectilinear direction (Z): straightness, taper, cylindricity, squareness, paralleness Radius direction (R): straightness Functions: CN measuring function, notch function (level, angle, cursor), parameter design value collation Types of filters: digital (2RC, Gaussian) Cut-off value: Rotation direction: 15, 50, 150, 500, 15-150, 15-500 peaks/rotation Rectilinear direction (Z): 0.025, 0.08, 0.25, 0.8, 2.5 or 8mm Display: Monitor: 15" Color Content: measuring conditions, measuring parameters, profile drawing (expansion plan, 3D plan, shading), printer output conditions, comments, error message, etc. Recording unit: Method: select color printer or laser printer Magnification: 10-200K (22 steps), auto, measuring magnification Power source: AC 100V, 50/60Hz Power consumption: 800VA (not including printer) Air source: 0.5 - 0.7MPa Air consumption: 30 l/min (1) Reference sphere (1) Reference cylinder (2) Reference gauge blocks Computer & monitor Currently installed in cleanroom 2002 vintage.
ZEISS/ACCRETECH/TSK RONCOM 55A是為半導體工業設計的最先進的掩模和晶圓檢測設備。該系統提供出色的圖像分辨率、高靈敏度和自動缺陷審查單元(ADRS)。基本機器由電動x/y級、自動晶圓處理器、顯微鏡頭和光源組成。該工具可同時進行1 x和10 x檢查。顯微鏡頭具有10倍的無窮大校正光學資產,在亮場和暗場照明中均具有平坦的視野,具有優異的成像性能。光源高度穩定,具有40 klux輸出能力。與電動濾波器輪一起,這允許應用特定的缺陷檢查,如劃痕,顆粒,電荷陷阱,模式故障等等。該模型還提供了自動缺陷檢查設備(ADRS),這是一種先進的基於AI的機器學習算法,能夠以優異的可靠性進行自動缺陷檢查。系統的結果可以導出到不同的格式進行報告和進一步分析。TSK RONCOM 55A具有用於晶圓處理、檢查、審查和分析的全面軟件功能。其用戶界面直觀易用,非常適合半導體行業各種缺陷檢測應用。該裝置的核心是最先進的電動x/y級,在樣品裝卸和檢查期間提供精確、可重復的運動。結合自動化晶片處理程序,這允許一口氣檢查多個晶片,同時在檢查多個晶片之間保持突出的準確性和可重復性。總體而言,蔡司RONCOM 55A是一種先進的機器,設計用於半導體行業的掩模和晶圓檢查。它提供高圖像分辨率、可靠的自動化缺陷檢測和易於使用的軟件,使其成為精確高效的缺陷檢測的絕佳選擇。
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