二手 ZEISS / ACCRETECH / TSK RONCOM 55A #9118660 待售
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ID: 9118660
優質的: 2002
Form tester
Measuring range:
Max. measuring diameter: 350mm
Left/right feed (R-axis): 191mm
Up/down feed (Z-axis): 350mm
Max. load diameter: 600mm
Max. measuring height: outer diameter 350mm (675mm for roundness/coaxiality measurement), inner diameter 350mm
Rotation accuracy:
JIS B7451: (0.02 + 6H/10000)um H: height from table surface to measuring point (mm)
Max. deviation from min. square circle: (0.01 + 3H/10000)um
Straightness accuracy:
Up/down direction (Z-axis): 0.15um/100mm, 0.3um/350mm
Radius direction (R-axis): 1um/100mm
Parallelness accuracy:
Up/down direction (Z-axis): 1.5um/350mm
Rotation speed:
Measurement: 2-10/min
Alignment: 6, 10 or 20/min
Up/down speed (Z-axis):
Measuring speed: 0.6-6.0mm
Movement speed: 0.6-30.0mm
Radius speed (R-axis)
Measuring speed: 0.6-6.0mm
Movement speed: 0.6-15mm
Auto stop:
Function: Z-axis, R-axis
Stop accuracy: Z-axis +/-5um, R-axis +/-5um
Table load conditions:
Table outer diameter: 290mm
Centering adjustment range: +/-5mm (automatic)
Tiling adjustment range: +/-1° (automatic)
Detector:
Measuring force: 30-100mN
Stylus shape: 1.6mm carbide ball
Roundness evaluation of profile error:
MZC (min. range center line method), LSC (min. square center line method), MIC (max. inscribed circle center line method)
MCC (min. circumscribed circle center line), N.C. (no correction)
Measuring items:
Rotation direction: roundness, flatness, parallelness, concentricity, coaxiality, cylindricity, diameter deviation, non-uniformity, squareness, run-out
Rectilinear direction (Z): straightness, taper, cylindricity, squareness, paralleness
Radius direction (R): straightness
Functions: CN measuring function, notch function (level, angle, cursor), parameter design value collation
Types of filters: digital (2RC, Gaussian)
Cut-off value:
Rotation direction: 15, 50, 150, 500, 15-150, 15-500 peaks/rotation
Rectilinear direction (Z): 0.025, 0.08, 0.25, 0.8, 2.5 or 8mm
Display:
Monitor: 15" Color
Content: measuring conditions, measuring parameters, profile drawing (expansion plan, 3D plan, shading), printer output conditions, comments, error message, etc.
Recording unit:
Method: select color printer or laser printer
Magnification: 10-200K (22 steps), auto, measuring magnification
Power source: AC 100V, 50/60Hz
Power consumption: 800VA (not including printer)
Air source: 0.5 - 0.7MPa
Air consumption: 30 l/min
(1) Reference sphere
(1) Reference cylinder
(2) Reference gauge blocks
Computer & monitor
Currently installed in cleanroom
2002 vintage.
ZEISS/ACCRETECH/TSK RONCOM 55A是為半導體工業設計的最先進的掩模和晶圓檢測設備。該系統提供出色的圖像分辨率、高靈敏度和自動缺陷審查單元(ADRS)。基本機器由電動x/y級、自動晶圓處理器、顯微鏡頭和光源組成。該工具可同時進行1 x和10 x檢查。顯微鏡頭具有10倍的無窮大校正光學資產,在亮場和暗場照明中均具有平坦的視野,具有優異的成像性能。光源高度穩定,具有40 klux輸出能力。與電動濾波器輪一起,這允許應用特定的缺陷檢查,如劃痕,顆粒,電荷陷阱,模式故障等等。該模型還提供了自動缺陷檢查設備(ADRS),這是一種先進的基於AI的機器學習算法,能夠以優異的可靠性進行自動缺陷檢查。系統的結果可以導出到不同的格式進行報告和進一步分析。TSK RONCOM 55A具有用於晶圓處理、檢查、審查和分析的全面軟件功能。其用戶界面直觀易用,非常適合半導體行業各種缺陷檢測應用。該裝置的核心是最先進的電動x/y級,在樣品裝卸和檢查期間提供精確、可重復的運動。結合自動化晶片處理程序,這允許一口氣檢查多個晶片,同時在檢查多個晶片之間保持突出的準確性和可重復性。總體而言,蔡司RONCOM 55A是一種先進的機器,設計用於半導體行業的掩模和晶圓檢查。它提供高圖像分辨率、可靠的自動化缺陷檢測和易於使用的軟件,使其成為精確高效的缺陷檢測的絕佳選擇。
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