二手 ACCUTHERM AW 810 #9185465 待售
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ID: 9185465
晶圓大小: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
ERP Pyrometer:
450-1250°C
With ±1°C accuracy
Thermocouple:
100-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
Isolated quartz tube:
Without pyrometer window
With pyrometer window
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas line with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder: 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Option:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C
Temperature sensor: TC
Longest steady time @1000 °C: 10mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Option:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power:
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810是為各種工業應用而設計的工業級烤箱/爐。這座爐子的發電站采用堅固耐用的鋼和不銹鋼建造的頂端結構，使其能夠輕松地進行苛刻的溫度應用。強大的燃燒器技術、雙級燃氣加熱設備和高速氣流為包括金屬加工和鍛造在內的各類工業應用提供一致、準確的溫度。AW 810的散熱設計在動力和性能上無與倫比。該爐為每個燃燒室配備重型燃燒室，采用先進的模塊化設計，以減少停機時間。燃燒器燃燒器由使用天然或液化石油氣的優質燃燒器提供動力。雙級燃氣系統在爐內提供高效準確的溫度控制，不斷推動火焰，確保精確加熱。ACCUTHERM AW 810的內室設計為充分利用其高速、低壓氣流單元。這是通過使用低矮的孔徑密封來實現的，這有助於保持整個腔室的均勻溫度。風扇驅動的對流機確保當室內溫度達到極端水平時，傳熱保持一致。AW 810的內部覆蓋著一個保護性的S型熱工擋板。這種專門的擋板通過屏蔽墻壁免受高溫影響來提高腔室的熱效率，確保腔室在最佳持續時間內保持其溫度。耐熱絕緣有助於減少熱量損失，最大限度地提高能源效率。ACCUTHERM AW 810還配備了防護安全工具。資產包括一個集成的高溫安全開關，在過熱時切斷腔室和風扇的電源。此外，該爐設計有溫度限制控制，當溫度達到不安全水平時停止運行。對於後處理和加熱應用，AW 810是理想的選擇。這款功能強大的烤箱/爐采用重型鋼結構、雙壁腔室和精確溫度控制,是需要一致、可重復、可靠的加熱和冷卻過程的工業應用的理想解決方案。ACCUTHERM AW 810具有耐用的結構和節能性能,是滿足您所有工業應用需求的理想選擇。
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