二手 ACCUTHERM AW 810V #9185474 待售
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ID: 9185474
晶圓大小: 2"-8"
Rapid thermal processing system, 2"-8"
Vacuum pressure: 50m Torr to 13 Torr / 13 Torr to 760 Torr
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
K-Type TC temperature accuracy: ±1°C
Thermocouple temperature accuracy: ±0.5°C
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across a 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Door plate with TC connection port
Top and bottom quartz windows
Heating module with 28 (1.2kW) radiation lamps
(6) Bank zones control
Oven control board
Main control board
Quartz tray: 2-4" / 4-6" / 5-8" Round wafer
(2) Gas lines with gas MFC with shut-off valve
Main vacuum valve
Options:
Atmospheric process function
Vacuum pressure measurement and control function
Vacuum pump:
Mechanical
Dry
Multiple process gases
MFCs (Up to 4) with gas control board
K-Type TC assembly for high temperature
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Omega meter thermocouple calibration
Shutt-off valve: Quartz tube
Lamps cooling control
Spare parts
Types:
Vacuum RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube: No
Gold plating plates:
Top and bottom in lamp module only
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate materials:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250/1500°C
Temperature sensor: TC, Special TC
Longest steady time @1000°C: 10mins
Vacuum pressure control:
50m Torr-13 Torr (Option) / 10-6 Torr
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating
Susceptor size: 4, 5, 6, 8, 4X4”, 5X3”, 16X2”
Base pressure: 50m Tor / 10-6 Torr
Options:
Omega meter: CL23A
Process gas lines with MFCs: 2, 3
Atmospheric function
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810V爐是一種功能強大的高溫爐/爐,旨在滿足一系列先進工業工藝和應用的需要。AW 810V是一種強制對流烤箱，利用空氣循環方法來確保整個工作室內的溫度一致，均勻。這樣可以快速加熱大批次或大批次，使中小型批次得到高效、準確的處理。ACCUTHERM AW 810V配備雙殼低熱質量結構。這使設備能夠在高達2500 °F （1371 °C）的溫度下運行,同時保持出色的功率溫度比。AW 810V還采用節能設計,最大限度地提高設備效率。通過使用高容量加熱元件，設備確保最大功率，同時仍為用戶提供快速恢復時間。ACCUTHERM AW 810V中的氣流是完全可調節的，允許用戶調節空氣速度，為應用創造最佳的熱環境。AW 810V的內室由高級鋁鋼建造而成。這樣可以確保溫度的均勻性和均勻性，同時保持加工材料的完整性。烤箱配有可調節的貨架系統，允許用戶定制烤箱的內部配置。ACCUTHERM AW 810V設計有堅固的門組件和獨特的密封單元,可減少能源浪費並確保烤箱的完整性。AW 810V具有一系列用戶友好的控制系統,例如數字顯示、計時器和溫度掃描。溫控機提供精確的溫度控制，完全可編程，允許用戶精確重現溫度曲線。用戶還可以利用計時器控制方便的調度活動和溫度掃描快速，同時加熱不同的部件。除了ACCUTHERM AW 810V的多項功能外，還包括多項安全功能。AW 810V獲得了UL-CE和CE的批準,包括保護人員、設備和正在處理的材料的一系列安全措施。這些安全功能包括過溫控制繼電器、高溫報警工具和緊急關閉。ACCUTHERM AW 810V是各種需要高性能、可靠的烤箱或爐的工業應用的完美解決方案。AW 810V具有高效的加熱能力和先進的安全特性,是需要高效、可靠、經濟高效的烤箱或爐的用戶的絕佳選擇。
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