二手 ACCUTHERM AW 820 #9185471 待售
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ID: 9185471
晶圓大小: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
ERP Pyrometer: 450°C-1250°C
With ±1°C accuracy
Thermocouple: 100°C-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with touch screen monitor, 15"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Isolated quartz tube without pyrometer window or with Pyrometer window
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas lines with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder for 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Options:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Stand alone
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C/1500°C
Temperature sensor: TC
Longest steady time @1000 °C: 30 mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Options:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 820是一種高效的電爐，通常用於陶瓷應用，如玻璃制造、搪瓷和金屬加工。該爐具有先進的絕緣和自動溫度控制功能，可保持溫度恒定，是為最大限度節省能源而專門設計的。這款電爐由不銹鋼框架構成，並配有碳化矽塗層鋼內部和不銹鋼外部。此外，該爐還在鋼內部和不銹鋼外部之間安裝了一個特殊的耐熱磚襯裏，這有助於保持熱量和電量。該爐還配備了強制空氣冷卻設備，以確保保持在最佳溫度條件下。AW 820極好地利用技術來保證其能效。其最先進的電控系統管理其所有的熱功能和能耗管理。這個電動控制單元包括一個觸摸屏液晶面板，可以用來監控溫度和能源使用情況，以及設定所需的工作溫度。此外,還有一個內置節能計時器,可用於設置每個工作周期所需的開始和結束時間。ACCUTHERM AW 820的設計達到820°C的溫度，溫度均勻度± 3°C。其設計工作溫度為0°C至1100°C，具有18.4 kW的額定功率和230V的單相功率輸入。AW 820設計方便安全操作。它的整體安全特性包括一個熱電偶效應激活的安全裝置，以及一個彈簧加載的安全互鎖，旨在防止未經授權進入爐子。此外，它的網門還配有一個限位開關，它將在打開爐子時切斷爐子的電源。爐子還配有一個警報機，可以提醒用戶註意任何不安全的操作條件。ACCUTHERM AW 820是設計精良、節能的電爐,具有最高的能效、良好的溫度均勻性和良好的安全特性,是需要陶瓷工藝操作的絕佳選擇。
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