二手 LINTEC RAD 2010 M/12 #293760939 待售
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ID: 293760939
晶圓大小: 12"
UV Irradiation system, 12"
Travel speed: 30-95 mm/s
Noise level: 70 dB
UV Lamp:
High pressure mercury lamp: HHL-2800/B-FL-N
Distance between electrodes: 400 mm
Operation environment:
Ambient temperature: 20-25°C ± 1°C
Ambient humidity: 55% ± 15%
Ambient altitude: < 2000 m
Air supply:
Pressure: 0.5-0.8 MPa
Consumption: >10 L/min (ANR)
Nitrogen source:
Nitrogen pressure: 0.29-0.31 MPa
Nitrogen consumption: >30 L/min (ANR)
Power consumption: 4.0 kW
Power supply: 200-230 VAC ±10% (±AC190-253V), Single phase, 50/60 Hz.
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