二手 SEMICS Opus III SH #293773919 待售

Prober, 6"-12" Temperature range: Ambient to 150°C Chuck Force: 300kg Index time: 200 m sec Smart Probe card Alignment (SPA) mechanism Intelligent overdrive control Fast linear motor control for XY stage Z-down control during power-down CCD Camera for wafer alignment Cassette mapping for thin wafers Probing area: X-axis: ±175 mm Y-axis: ±185 mm Accuracy: Positioning accuracy (X/Y): ±1.0 µm Z-axis accuracy: ±1.0 µm 2020 vintage.