ID: 293677497
晶圓大小: 12"
優質的: 2016
Prober, 12"
Temperature: Ambient / Hot
Nickel plated hot chuck
HM100L-H Hinge manipulator
Fan filter unit
ASU / BCU-Ⅱ
Linear motor for stage
X and Y Probing accuracy: ±1.8 μm
Z Probing accuracy: ±5 μm
SACC
Hard Disk Drive (HDD) missing
2016 vintage.
