二手 ALLWIN21 AW 901e #9201818 待售
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ID: 9201818
晶圓大小: 3"-6"
TTW Plasma etcher, 3"-6"
Wafer loading: 3-Axis robot
Stationary cassette plate
Plasma power: RF 13.56 MHz
Type: Parallel / Single wafer process
Through the wall (TTW)
Gas lines: 1-3 Lines
Throughput: 30-60 WPH, Process dependent
Temperature: 6-65ºC (±2 ºC) Capability
Gas lines: (4) Gas lines with MFCs
Etcher rate:
AW-901eR: 0-8000A / minute
AW-903eR: 0-4000A / minute
Process dependent
Uniformity: Up to ±3%, Process dependent
Particulate: <0.05 / cm2
Selectivity:
901eR: 2-20:1
AW-903eR: 2-20:1
Process dependent
MTBF / MTTA / MTTR: 450 Hours / 100 Hours / 3.5 Hours
Options:
EOP Module with PCB
GEM/SECS II Function
Lamp tower alarm with buzzer
Throttle valve pressure control
Vacuum pump
Chiller for chuck and chamber
Through the wall
Main frame, standard
Pentium class PC with
Keyboard
Mouse
USB
SW Backup
Cables
Chuck:3"-6"
Wafer aligner / Cooling station
3-Axis integrated solid robot:
H-Zero (Standard)
H1-7 x 10.5 (TTW)
Fixed cassette station:
Chuck assembly
901eR Non-anodized
903eR Anodized with flat
903eR Anodized with flat
903eR Non-anodized with flat
Reactor Assembly:
901eR Non-anodized
903eR Anodized
903eR Non-anodized
903eR High performance
Direct cooling
Non direct cooling
Pins:
Quartz
Ceramic SST
Centering ring:
Aluminum
Ceramic
Main control board:
Gas box with (4) inline gas lines, MFC, filters, and pneumatic valves
RF Matching network with PCB
RF Generator: 13.56 MHz
MKS Elite: 300 HD
MKS Elite: 600 HD
MKS Elite: 1000 HD
ENI ACG 3
ENI ACG 10
AC / DC Box
ATM Sensor
UPC Pressure control
225 SCCM: 901eR
2000 SCCM: 903eR
MKS Baratron with peumatic Iiolation valve
Main vacuum valves
Front EMO interlocks
Touch screen GU, 15"
AW-901eR AW-903eR
Material Etched Polysilicon / Nitride Oxide,SOG,Nitride
Main etchant gases SG6, O2 / SF6,O2 CHF3,SF6,He
Other gases CHCLF2 / None None
Pressure (mTorr) 200-450 / 250-350 1600-3000
RF Power (Watts) 100-250 / 200-300 400-600
Temperature (C) 30 / 30 23
AC Power:
AC Module: 200-240 VAC Selectable, 50/60 Hz, 3-wire single-phase
Temperature controller: 200-240 VAC, 50/60 Hz, 3-wire single-phase
Vacuum pump: 208-230 / 460 VAC, 60 Hz or 200-220 / 380 VAC, 50Hz, 3 Phase
RF Generator: 200-240 VAC
PC / Monitor: 115 VAC
Cabinet exhaust: 100 cfm.
ALLWIN21 AW 901 e是一種快速熱處理器（RTP）,具有多種功能,使其在重流焊接應用中特別有用。在重新流動焊接中,焊料粘貼會套用到電路板和元件上。然後將組件放在板上，高溫加熱，以便熔化焊料，建立可靠的電氣連接。AW 901e旨在提供快速熱處理（RTP），具有快速循環時間和高溫，非常適合這類應用。ALLWIN21 AW 901e的最高加熱溫度為350 °C，高於市場上許多其他RTP。這種高溫確保焊料快速熔化，電氣連接可靠。最大腔室尺寸為24 「x 24」，適合更大的應用。加熱元件是陶瓷紅外加熱器，有助於降低能源成本，提供高溫精度。該機組還配備了3個溫度程序，允許在制造過程中具有靈活性。AW 901e的設計考慮了安全性和效率。該單元包括一個壓力開關，在處理過程中確保適當的氣壓，這有助於防止火災從錯誤的焊接。冷卻系統旨在幫助最小化腔室中的溫度梯度,從而確保組件不會過熱和損壞。該裝置還包括一個PID溫度控制器，這有助於確保精確的溫度控制和穩定性。ALLWIN21 AW 901 e效率高，供熱均勻。由於其快速的循環時間，在重新流動焊接過程中可以顯著降低人工成本。它易於使用,非常適合生產使用,低成本使其成為許多企業的一個有吸引力的選擇。總體而言，AW 901e提供了高性能的RTP，加熱時間快，加熱均勻。最高溫度為350 °C,非常適合重新焊接應用,它包括多種安全和高效設計的功能。它還具有成本效益和易於使用,對於希望簡化焊接過程的企業來說,它是一個絕佳的選擇。
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