二手 AMAT / APPLIED MATERIALS Vantage Radiance #293587166 待售
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ID: 293587166
Rapid Thermal Processing (RTP) system, 12"
Process: RadOx
(2) Chambers
Wafer type: SNNF
Platform type: Vantage 3.X
Position A and B: (V352) RadOx2
Chamber A and B process: Toxic RP
OHT WIP Delivery
Dual 2-slot active cool down station
E99 Docked reading capability
Load port: SELOP 7
Load port operator interface: Standard (8) lights
Configurable colored lights
Top air intake system
Upper E84 interface enabled OHT
Upper E84 PIO sensors and cables
E99 Carrier ID: TIRIS With RF
Operator access switch
4-Color configurable light towers
Interface A option
eDiagnostic
Out the back connection type: RP
Out the back connection H2
(2) Water cooling chambers
RP Integration hardware: Chamber A and B
Standard RAGB rear light tower
Vantage skin: (2) Toxic chambers
IPUP Transfer pump
Open loop tuner
MFC Type: STEC
Core anneal and RTO
Monitor 1: Flat panel with keyboard on stand, 17"
Monitor 2: Flat panel on stand, 17"
Monitor 1 and 2 cables: 25 ft with 16 feet effective
SEMI F47
Semi S2 compliance
RTP Chamber type: Radiance RadOx2, 12"
Technology option: Open loop tuner
MFC Type: STEC
Core anneal and RTO
Rotation type: WRLD Toxic
Low flow O2: 5 SLM
High flow O2: 50 SLM
Oxygen analyzer
H2:
High flow
Low flow
Side inject
No process N2 for flammable MNFLD
Gas pallet type: TOXIC RP Common gas pallet
No MWBC improvement kit
Chamber integration lines: RadOx2
RP Pump cable: 81 Feet
Base ring: RadOx2 base ring
Line 1 / N2 (N/O), 50 SLM
Line 2 / O2, 50 SLM
Line 3 / O2, 5 SLM
Line 6 / H2, 15 SLM, Side inject high flow
Line 7 / H2, 22 SLM, High flow
Line 8 / H2, 2 SLM, Low flow
Line 10 / N2 (P/P), 30 SLM Restrictor
Line 11 / He, 30 SLM
Line 12 / N2 (BP), 50 SLM
Line 13 / N2 (Maglev), 100 SLM
Docking station FST install kit
Does not include Hard Disk Drive (HDD)
2017 vintage.
AMAT/APPLIED MATERIALS Vantage Radiance是一款高性能、先進的快速熱處理器,它采用創新技術來提高工藝穩定性,實現高溫轉換,並最大限度地提高芯片制造質量,同時顯著縮短工藝時間。AMAT Vantage Radiance有能力在幾秒鐘內實現高達2000 °C的高溫轉變。這種極高的性能RTP還允許精確的溫度控制。應用材料Vantage Radiance在整個加熱區域具有更好的溫度均勻性和更快的瞬態熱響應時間。它還提供了一個寬廣的操作窗口,允許更大的工藝溫度範圍,從而提供工藝靈活性。Vantage Radiance具有高效的過程控制功能,使設備能夠監控溫度分布,並具有可調的時間和溫度安全邊距,以增強系統控制。它的自動化功能有助於減少周期時間、提高可重復性並簡化設備的設置和控制。其創新的輻射加熱和對流冷卻能力有助於保持溫度分布均勻,具有高度的時間穩定性。這有助於提高熱穩定性,降低因熱沖擊引起溫度波動的可能性。AMAT/APPLICED MATERIALS Vantage Radiance的多區域溫度控制和全面自動化功能有助於在過程中保持最高質量和一致性。本機還集成了多種先進的安全功能,保證了人員和設備的安全。利用其創新技術,AMAT Vantage Radiance能夠在現代IC制造所需的溫度下準確、快速地進行加工,有助於縮短循環時間,同時保持工藝質量。總體而言,APPLIED MATERIALS Vantage Radiance是一款高性能和先進的快速熱處理器,具有創新的加熱技術、全面的自動化功能和先進的安全功能。它旨在提供高度的溫度均勻性和穩定性,同時幫助最大限度地提高芯片制造的質量和效率。
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